EM-Tec MCS X-Y series SEM magnification calibration standards
bidirectional X-Y SEM calibration standard with 2.5mm to 1 µm or 100nm patterns



Introduction

The EM-Tec MCS X-Y series calibration standards share the same calibration range and MEMS manufacturing technology as the EM-Tec MCS series magnification calibration standards. These fully featured bi-directional calibration standards offer adjacent calibration pattern in both and X and Y direction. They are ideal for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.
Two types of calibration ranges for the Em-Tec MCS X-Y calibration standards are offered, both calibration ranges with certificate of traceability or with an individual certificate of calibration:

  • EM-Tec MCS-1-XY with X-Y scales ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers the 10x to 20,000x magnification range.
    We offer a traceable and a certified version
  • EM-Tec MCS-0.1-XY with X-Y scales ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.
    We offer a traceable and a certified version

The features on the EM-Tec MCS X-Y series are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold over chromium for the smaller features below 2.5µm. The gold deposited features ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS X-Y series are:

  • unprecedented precision over the full calibration range in both X and Y direction
  • all X-Y features in one single ultra-flat plane
  • metal on silicon with excellent signal to noise ratio
  • wider range of features to accurately calibrate low, medium and high magnification ranges
  • compatible with both SE and BSE imaging
  • fully conductive materials
  • easy to convert X-Y metric feature sizes
  • can be cleaned with plasma cleaning
  • all NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5x10µm) and 0.5µm (500nm).


Specifications for the EM-Tec MCS series calibration standards
Substrate

525µm thick boron doped ultra-flat wafer with <100> orientation

Conductive

Excellent; 5-10 Ohm resistivity

Pattern size

2.5 x 2.5mm

Chip size 

4 x 4 mm (unmounted)

Features MCS-1-XY

2.5, 1.0, and 0.5mm both in X and Y direction
250, 100, 10, 5, 2.5 and 1µm both adjacent in X and Y direction

Features MCS-0.1-XY

with additional 500, 250 and 100nm both adjacent in X and Y direction

Features material 

50nm Chromium for feature sizes 2.5mm to 2.5µm
50nm Gold over 20nm Chromium for size 1µm to 100nm

Traceable uniformity

0.2% or better

Certified uniformity

0.03%

Traceable uncertainty

0.7% or better

Certified uncertainty

0.09%

Traceability 

Wafer level NIST traceability; average data measured on each production wafer

Certified 

Optional; each certified EM-Tec MCS standard is individually
calibrated against a NIST measured standard

Application

SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy

Identification

Product ID with serial number etched

Mounting

Mounting available on popular SEM stubs

Supplied 

Unmounted: supplied in a Gel-Pak box


Full list of available specimen mounts for calibration standard and test specimens
Technical Support Bulletin: EM-Tec MCS-1-XY& MCS-0.1-XY Magnification Calibration Standards

Ordering Information for EM-Tec MCS-0.1 X-Y magnification calibration standard

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec MCS-1TR-XY traceable magnification calibration standard, 2.5mm to 1µm in both X and Y direction
EM-Tec MCS-1TR-XY traceable magnification calibration standard, 2.5mm to 1µm in both X and Y direction The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in X and Y direction.
The 31-T31000 EM-Tec MCS-1TR-XY is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.



We also offer a individually certified version.
Product # Unit Price* Add to Quote / Order
31-T31020-U EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in both X and Y direction, unmounted
Qty:

each €119,50
31-T31020-1 EM-Tec MCS-1TR -XY traceable calibration standard, 2.5mm to 1µm in both X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €129,50
31-T31020-2 EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm in both X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €129,50
31-T31020-6 EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €144,50
31-T31020-8 EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €129,50


EM-Tec MCS-1CF-XY certified magnification calibration standard, 2.5mm to 1µm in both X and Y direction
EM-Tec MCS-1CF-XY certified magnification calibration standard, 2.5mm to 1µm in both X and Y direction The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in both X and Y direction.
The 31-C31000 EM-Tec MCS-1CF-XY is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

Product # Unit Price* Add to Quote / Order
31-C31030-U EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, unmounted
Qty:

each €895,00
31-C31030-1 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €905,00
31-C31030-2 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €905,00
31-C31030-6 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €920,00
31-C31030-8 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €905,00


EM-Tec MCS-0.1TR-XY traceable magnification calibration standard, 2.5mm to 100nm in both X and Y direction
EM-Tec MCS-0.1TR-XY traceable magnification calibration standard, 2.5mm to 100nm in both X and Y direction The EM-Tec MCS-0.1-XY calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in both X and Y direction. The 31-T32040 EM-Tec MCS-0.1TR-XY is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard.

Product # Unit Price* Add to Quote / Order
31-T32040-U EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, unmounted
Qty:

each €587,50
31-T32040-1 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €598,50
31-T32040-2 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €598,50
31-T32040-6 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €614,50
31-T32040-8 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €598,50


EM-Tec MCS-0.1CXY certified magnification calibration standard, 2.5mm to 100nm in both X and Y direction
EM-Tec MCS-0.1CXY certified magnification calibration standard, 2.5mm to 100nm in both X and Y direction The EM-Tec MCS-0.1-XY calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features in X and Y direction. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in X and Y direction. The 31-C32000 EM-Tec MCS-0.1CF-XY is individually certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes.



Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes, see TSB 31-C32000 EM-Tec MCS-0.1CF replacement for SIRA calibration standard
Product # Unit Price* Add to Quote / Order
31-C32050-U EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, unmounted
Qty:

each €1465,00
31-C32050-1 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €1484,00
31-C32050-2 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €1484,00
31-C32050-6 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €1499,00
31-C32050-8 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €1484,00




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM Series Supplies
  Field & Lab Sampler Kits
  FlowView liquid sample Kit

Instruments

  Acoustic Enclosures
  Cressington SEM coaters
  TEM Sample Prep
  Diaphragm Pump
  Rotary vacuum Pump
  Precision diamond saw  
  TEM Grids
  TEM Support Films
  Silicon Nitride Films
  K-Kit Wet Cell Holder
  Graphene Films
  TEM Grid Boxes
  Cryo Grid Boxes
  TEM Sample Staining
  3mm Embedding Tubes
  Filaments/Cathodes
  Eyelash Manipulators

Cryo Supplies

  Cryo Grid Boxes
  Other Cryo Supplies

FIB Supplies

  FIB Lift-out Grids
  FIB Low Profile Stubs
  FIB Grid Holders
  FIB Pre-tilt Holders
  FIB Pre-tilt stubs
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies

  Vacuum Gauges
  KF/NW Vacuum Parts
  KF/NW Vacuum Hoses
  ISO Vacuum flange parts
  Vacuum Oil and Grease
  Vacuum Sealant
  Diaphragm Pump
  Rotary vacuum Pump
  Vacuum Sample Storage
  Vacuum Pick-Up Pens

Sample Coating Supplies

  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  SEM Sample Coating Fluid

Evaporation Supplies

  Thermal Evaporation Sources
  Evaporation Materials
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes & Tabs
  Non-Conductive Adhesives
  Sample Storage
  Hand Tools
  Sorting Wire Mesh
  Preparation Surfaces
  Cleaning / Gloves
  Conductive Metal Powders
  Metallographic Sample Prep
  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Nano-Tec Mica Discs
  HOPG Substrates

Light Microscopy

  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black Metal Slides
  Slide Storage Boxes
  LM Calibration
  Plastic Transfer Pipettes
  Optical Lens Tissue
  Glass Petri Dishes
  Digital Microscope
  PTFE Beakers