EM-Tec MCS X-Y series SEM magnification calibration standards
bidirectional X-Y SEM calibration standard with 2.5mm to 1 µm or 100nm patterns



Introduction

The EM-Tec MCS X-Y series calibration standards share the same calibration range and MEMS manufacturing technology as the EM-Tec MCS series magnification calibration standards. These fully featured bi-directional calibration standards offer adjacent calibration pattern in both and X and Y direction. They are ideal for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.
Two types of calibration ranges for the Em-Tec MCS X-Y calibration standards are offered, both calibration ranges with certificate of traceability or with an individual certificate of calibration:

  • EM-Tec MCS-1-XY with X-Y scales ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers the 10x to 20,000x magnification range.
    We offer a traceable and a certified version
  • EM-Tec MCS-0.1-XY with X-Y scales ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.
    We offer a traceable and a certified version

The features on the EM-Tec MCS X-Y series are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold over chromium for the smaller features below 2.5µm. The gold deposited features ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS X-Y series are:

  • unprecedented precision over the full calibration range in both X and Y direction
  • all X-Y features in one single ultra-flat plane
  • metal on silicon with excellent signal to noise ratio
  • wider range of features to accurately calibrate low, medium and high magnification ranges
  • compatible with both SE and BSE imaging
  • fully conductive materials
  • easy to convert X-Y metric feature sizes
  • can be cleaned with plasma cleaning
  • all NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5x10µm) and 0.5µm (500nm).


Specifications for the EM-Tec MCS series calibration standards
Substrate

525µm thick boron doped ultra-flat wafer with <100> orientation

Conductive

Excellent; 5-10 Ohm resistivity

Pattern size

2.5 x 2.5mm

Chip size 

4 x 4 mm (unmounted)

Features MCS-1-XY

2.5, 1.0, and 0.5mm both in X and Y direction
250, 100, 10, 5, 2.5 and 1µm both adjacent in X and Y direction

Features MCS-0.1-XY

with additional 500, 250 and 100nm both adjacent in X and Y direction

Features material 

50nm Chromium for feature sizes 2.5mm to 2.5µm
50nm Gold over 20nm Chromium for size 1µm to 100nm

Traceable uniformity

0.2% or better

Certified uniformity

0.03%

Traceable uncertainty

0.7% or better

Certified uncertainty

0.09%

Traceability 

Wafer level NIST traceability; average data measured on each production wafer

Certified 

Optional; each certified EM-Tec MCS standard is individually
calibrated against a NIST measured standard

Application

SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy

Identification

Product ID with serial number etched

Mounting

Mounting available on popular SEM stubs

Supplied 

Unmounted: supplied in a Gel-Pak box


Full list of available specimen mounts for calibration standard and test specimens
Technical Support Bulletin: EM-Tec MCS-1-XY& MCS-0.1-XY Magnification Calibration Standards

Ordering Information for EM-Tec MCS-0.1 X-Y magnification calibration standard

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec MCS-1TR-XY traceable magnification calibration standard, 2.5mm to 1µm in both X and Y direction
EM-Tec MCS-1TR-XY traceable magnification calibration standard, 2.5mm to 1µm in both X and Y direction The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in X and Y direction.
The 31-T31000 EM-Tec MCS-1TR-XY is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.



We also offer a individually certified version.
Product # Unit Price* Add to Quote / Order
31-T31020-U EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in both X and Y direction, unmounted
Qty:

each €119,50
31-T31020-1 EM-Tec MCS-1TR -XY traceable calibration standard, 2.5mm to 1µm in both X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €129,50
31-T31020-2 EM-Tec MCS-1TR traceable calibration standard, 2.5mm to 1µm in both X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €129,50
31-T31020-6 EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €144,50
31-T31020-8 EM-Tec MCS-1TR-XY traceable calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €129,50


EM-Tec MCS-1CF-XY certified magnification calibration standard, 2.5mm to 1µm in both X and Y direction
EM-Tec MCS-1CF-XY certified magnification calibration standard, 2.5mm to 1µm in both X and Y direction The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in both X and Y direction.
The 31-C31000 EM-Tec MCS-1CF-XY is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

Product # Unit Price* Add to Quote / Order
31-C31030-U EM-Tec MCS-1CF certified calibration standard, 2.5mm to 1µm, unmounted
Qty:

each €895,00
31-C31030-1 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €905,00
31-C31030-2 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €905,00
31-C31030-6 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €920,00
31-C31030-8 EM-Tec MCS-1CF-XY certified calibration standard, 2.5mm to 1µm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €905,00


EM-Tec MCS-0.1TR-XY traceable magnification calibration standard, 2.5mm to 100nm in both X and Y direction
EM-Tec MCS-0.1TR-XY traceable magnification calibration standard, 2.5mm to 100nm in both X and Y direction The EM-Tec MCS-0.1-XY calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in both X and Y direction. The 31-T32040 EM-Tec MCS-0.1TR-XY is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard.

Product # Unit Price* Add to Quote / Order
31-T32040-U EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, unmounted
Qty:

each €587,50
31-T32040-1 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €598,50
31-T32040-2 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €598,50
31-T32040-6 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €614,50
31-T32040-8 EM-Tec MCS-0.1TR-XY traceable calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €598,50


EM-Tec MCS-0.1CXY certified magnification calibration standard, 2.5mm to 100nm in both X and Y direction
EM-Tec MCS-0.1CXY certified magnification calibration standard, 2.5mm to 100nm in both X and Y direction The EM-Tec MCS-0.1-XY calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features in X and Y direction. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in X and Y direction. The 31-C32000 EM-Tec MCS-0.1CF-XY is individually certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes.



Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes, see TSB 31-C32000 EM-Tec MCS-0.1CF replacement for SIRA calibration standard
Product # Unit Price* Add to Quote / Order
31-C32050-U EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, unmounted
Qty:

each €1465,00
31-C32050-1 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on standard 12.7mm pin stub
Qty:

each €1484,00
31-C32050-2 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on Zeiss 12.7mm pin stub
Qty:

each €1484,00
31-C32050-6 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 12.2mm JEOL stub
Qty:

each €1499,00
31-C32050-8 EM-Tec MCS-0.1CF-XY certified calibration standard, 2.5mm to 100nm in X and Y direction, mounted on 15mm Hitachi stub
Qty:

each €1484,00




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