EM-Tec FIB grid holders and FIB grid + sample holders
EM-Tec FIB grid holders and FIB grid + sample holders
Introduction
The EM-Tec FIB grid holders are designed to hold FIB grids and provide easy access to the posts on the FIB grids to attach the milled FIB lift-out lamellae. The FIB grid holders can be used in the FIB/SEM systems but also for safe storage of the FIB grids with attached lamellae. The EM-Tec FIB grid and sample holders are compact holders which hold the FIB grids directly aside a standard SEM pin stub with a sample. The lift-out lamellas only need to be moved over a short distance to attach them to the FIB grids. The EM-Tec FIB grid holders are all precision machined from vacuum grade aluminium:
- EM-Tec F12 is a basic yet practical FIB grid holder for 2 FIB grids. Based on the standard Ø12.7mm pin stub it is compact, low cost and useful for storing valuable samples. The 10mm wide vise clamp includes a ledge for easy positioning of the FIB grids. Available with standard pin and short Zeiss pin (EM-Tec F12Z)
- EM-Tec F12LP is the low profile version of the EM-Tec F12 grid holder for 2 FIB grids. The low height and small dimensions allow for high tilt operation at low working distance. The 12.5mm wide vise clamp includes a ledge for easy positioning of the FIB grids.
- EM-Tec F18 is a high capacity FIB grid holding stub for holding up to 8 FIB grids with 4 individual small clamps. It is basically 4 x the EM-Tec F12 on a 25.4mm (1”) stub. Each of the 10mm wide vise clamps includes a ledge for easy positioning of the FIB grids. Ideal for safe storage of the FIB grids with lamellas or for high throughput FIB applications.
- EM-Tec F25 is a larger FIB grid holder which can accommodate up to 5 FIB grids of the same thickness. The 25mm wide vise includes a ledge for easy positioning of the FIB grids and two brass thumb screws to operate the vise. Available with pin stub and M4 threaded hole.
- EM-Tec FS21 combines the EM-Tec F12 FIB grid holder with two standard 12.7mm (1/2”) pin stubs. The F12 FIB grid holder and the sample stubs can be rotated in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS21 FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at the same level when using Si wafer samples. Available with pin stub and M4 threaded hole.
- EM-Tec FS22 combines two F12 FIB grid holders with two standard 12.7mm (1/1”) pin stubs within a 27x27mm footprint. Both the F12 FIB grid holders and the pin stubs can be rotated independently in the holder for selecting the optimum orientation in the FIB/SEM system. The EM-Tec FS22 dual FIB grid and sample holder enables loading the samples and FIB grids close together. The FIB grid and the sample stubs are at the same level when using Si wafer samples. Available with pin stub and M4 threaded hole.
- EM-Tec FS25 combines the wider FIB grid holder vise with a holder for samples on the Ø25.4mm pin stubs in a single compact holder. This provides a single loading cycle for FIB grids and samples and short distances from lift-out to lamellae mounting. Wafer type sample surface is at the same height as the FIB grid posts. Available with pin stub and M4 threaded hole.
These holders can all be used on th FIB and FIB/SEM systems from FEI, Hitachi, Zeiss and Tescan.For JEOL FIB/SEM systems use a suitable EM-Tec stub adapter.
Product # |
Type |
Capacity |
Size w/o pin |
Holding |
SEM stage compatibility |
EM-Tec F12 |
2 FIB grids |
Ø12.7 x 8mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec F12Z |
2 FIB grids |
Ø12.7 x 8mm |
vise |
Short Zeiss Ø3.2mm pin |
|
EM-Tec F12LP |
2 FIB grids low profile |
12.5x7x3mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec F18 |
8 FIB grids |
Ø25.4 x 8mm |
4 vises |
Standard Ø3.2mm pin |
|
EM-Tec F25 |
5 FIB grids |
29 x 22.5 x 14mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec F25 |
5 FIB grids |
29 x 22.5 x 14mm |
vise |
M4 thread |
|
EM-Tec FS21 |
2 FIB grids + samples |
14 x 40.5 x 20mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec FS21 |
2 FIB grids + samples |
14 x 40.5 x 20mm |
vise |
M4 thread |
|
EM-Tec FS22 |
2x2 FIB grids + samples |
27 x 27 x 20mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec FS22 |
2x2 FIB grids + samples |
27 x 27 x 20mm |
vise |
M4 thread |
|
EM-Tec FS25 |
5 FIB grids + sample |
50 x 29 x 14mm |
vise |
Standard Ø3.2mm pin |
|
EM-Tec FS25 |
5 FIB grids + sample |
50 x 29 x 14mm |
vise |
M4 thread |
Ordering Information for EM-Tec FIB grid and FIB grid sample holders for FIB/SEM systems using pin stubs; TFS, FEI Dualbeam systems, Zeiss CrossBeam systems and Tescan FIB/SEM systems
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