Overview evaporation sources
Chromium plated tungsten rod sources
Micro-Electronic evaporation sources

R D Mathis folded boats evaporation sources
larger capacity folded evaporation boats made from Mo & Ta

•                          
• larger capacity folded boat evaporation sources  |
  • Folded evaporation boat type FB1, 114 x 54mm, 17cc
  • Folded evaporation boat type FB2, 110 x 54mm, 19cc
  • Folded evaporation boat type FB3, 156 x 54mm, 31cc
  • Folded evaporation boat type FB4, 156 x 54mm, 35cc
• Smaller capacity folded boat evaporation sources 
  • Folded evaporation boat type FB10, 36 x 32mm, 2cc
  • Folded evaporation boat type FB11, 65 x 25mm, 3cc
  • Folded evaporation boat type FB12, 75 x 29mm, 4cc

Introduction

The folded boat evaporation sources are made by folding the molybdenum or tantalum foil into an evaporation boat. This method results in somewhat larger capacity evaporation boats compared to evaporation boats with a pressed dimple or trough. There are two types of folded boats which differ in size and capacity. The folded boats evaporation sources are available in Mo, Ta with different foil thickness (0.13, 0.25 and 0.38mm). Available in pkg3 and Pkg/5 for the molybdenum folded boats and pkg/1 and pkg/3 for the tantalum folded boats. They are used as direct resistive heating sources for upwards evaporation, i.e. the substrates are mounted above the source.

larger capacity folded boat evaporation sources

Dimensions of the larger capacity folded boat evaporation sources

P/N	Bl	BW	H	OL	W	LL	Vol.	Mat.	Thickness
72-FB1	48mm	19mm	18mm	114mm	54mm	19mm	17cc	Mo/Ta/W	0.13/0.25/0.38mm
72-FB2	48mm	33mm	12mm	110mm	54mm	19mm	19cc	Mo/Ta/W	0.13/0.25/0.38mm
72-FB3	95mm	25mm	13mm	156mm	54mm	21mm	31cc	Mo/Ta/W	0.13/0.25/0.38mm
72-FB4	95mm	19mm	19mm	156mm	54mm	19mm	35cc	Mo/Ta/W	0.13/0.25/0.38mm

 

smaller capacity folded boat evaporation sources

Dimensions of the smaller capacity folded boat evaporation sources

P/N	Bl	BW	H	OL	W	LL	Vol.	Mat.	Thickness
72-FB10	17mm	11.4mm	11mm	36mm	32mm	9.7mm	2cc	Mo/Ta/W	0.13/0.25/0.38mm
72-FB11	32mm	9.7mm	8mm	65mm	25mm	14mm	3cc	Mo/Ta/W	0.13/0.25/0.38mm
72-FB12	40mm	12.7mm	8mm	75mm	29mm	17.5mm	4cc	Mo/Ta/W	0.13/0.25/0.38mm

Ordering information for the larger capacity folded boat evaporation sources

Folded evaporation boat type FB1, 114 x 54mm, 17cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 48mm 19mm 18mm 114mm 54mm 19mm 17cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB1Mo-1 Folded evaporation boat type FB1, 1.65 Volts, 293 Amps, 483 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/3 €102,10 72-FB1Mo-2 Folded evaporation boat type FB1, 1.21 Volts, 413 Amps, 500 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/3 €113,40 72-FB1Mo-3 Folded evaporation boat type FB1, 1.38 Volts, 634 Amps, 875 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/3 €153,10 72-FB1Ta-1 Folded evaporation boat type FB1, 3.78 Volts, 339 Amps, 1281 Watts, 1600°C, 0.13mm Tantalum Qty: each €81,30 72-FB1Ta-2 Folded evaporation boat type FB1, 2.93 Volts, 162 Amps, 1354 Watts, 1600°C, 0.25mm Tantalum Qty: each €141,80 72-FB1Ta-3 Folded evaporation boat type FB1, 2.57 Volts, 641 Amps, 1647 Watts, 1600°C, 0.38mm Tantalum Qty: each €211,70

Folded evaporation boat type FB2, 110 x 54mm, 19cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 48mm 33mm 12mm 110mm 54mm 19mm 19cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB2Mo-1 Folded evaporation boat type FB2, 1.90 Volts, 320 Amps, 608 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/3 €102,10 72-FB2Mo-2 Folded evaporation boat type FB2, 1.38 Volts, 448 Amps, 618 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/3 €147,40 72-FB2Mo-3 Folded evaporation boat type FB2, 1.16 Volts, 547 Amps, 635 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/3 €160,00 72-FB2Ta-1 Folded evaporation boat type FB2, 3.88 Volts, 348 Amps, 1350 Watts, 1600°C, 0.13mm Tantalum Qty: each €86,90 72-FB2Ta-2 Folded evaporation boat type FB2, 2.77 Volts, 491 Amps, 1360 Watts, 1600°C, 0.25mm Tantalum Qty: each €145,50 72-FB2Ta-3 Folded evaporation boat type FB2, 2.56 Volts, 657 Amps, 1682 Watts, 1600°C, 0.38mm Tantalum Qty: each €215,50

Folded evaporation boat type FB3, 156 x 54mm, 31cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 95mm 25mm 13mm 156mm 54mm 21mm 31cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB3Mo-1 Folded evaporation boat type FB3, 2.23 Volts, 303 Amps, 676 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/3 €124,70 72-FB3Mo-2 Folded evaporation boat type FB3, 1.60 Volts, 431 Amps, 690 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/3 €164,40 72-FB3Mo-3 Folded evaporation boat type FB3, 1.38 Volts, 536 Amps, 740 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/3 €187,10 72-FB3Ta-1 Folded evaporation boat type FB3, 4.60 Volts, 301 Amps, 1385 Watts, 1600°C, 0.13mm Tantalum Qty: each €117,20 72-FB3Ta-2 Folded evaporation boat type FB3, 3.89 Volts, 521 Amps, 2027 Watts, 1600°C, 0.25mm Tantalum Qty: each €196,60 72-FB3Ta-3 Folded evaporation boat type FB3, 3.73 Volts, 736 Amps, 2745 Watts, 1600°C, 0.38mm Tantalum Qty: each €255,20

Folded evaporation boat type FB4, 156 x 54mm, 35cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 95mm 19mm 19mm 156mm 54mm 19mm 35cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB4Mo-1 Folded evaporation boat type FB4, 2.18 Volts, 300 Amps, 654 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/3 €130,40 72-FB4Mo-2 Folded evaporation boat type FB4, 1.60 Volts, 413 Amps, 661 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/3 €175,80 72-FB4Mo-3 Folded evaporation boat type FB4, 1.72 Volts, 663 Amps, 1140 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/3 €192,80 72-FB4Ta-1 Folded evaporation boat type FB4, 4.14 Volts, 277 Amps, 1147 Watts, 1600°C, 0.13mm Tantalum Qty: each €121,00 72-FB4Ta-2 Folded evaporation boat type FB4, 3.64 Volts, 495 Amps, 1802 Watts, 1600°C, 0.25mm Tantalum Qty: each €198,50 72-FB4Ta-3 Folded evaporation boat type FB4, 3.15 Volts, 646 Amps, 2035 Watts, 1600°C, 0.38mm Tantalum Qty: each €257,00

Ordering information for the smaller capacity folded boat evaporation sources

Folded evaporation boat type FB10, 36 x 32mm, 2cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 17mm 11.4mm 11mm 36mm 32mm 9.7mm 2cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB10Mo-1 Folded evaporation boat type FB10, 0.75 Volts, 166 Amps, 125 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/5 €113,40 72-FB10Mo-2 Folded evaporation boat type FB10, 0.66 Volts, 265 Amps, 175 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/5 €122,90 72-FB10Mo-3 Folded evaporation boat type FB10, 0.68 Volts, 351 Amps, 237 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/5 €132,30 72-FB10Ta-1 Folded evaporation boat type FB10, 1.56 Volts, 159 Amps, 248 Watts, 1600°C, 0.13mm Tantalum Qty: pkg/3 €96,40 72-FB10Ta-2 Folded evaporation boat type FB10, 1.12 Volts, 242 Amps, 271 Watts, 1600°C, 0.25mm Tantalum Qty: pkg/3 €141,80 72-FB10Ta-3 Folded evaporation boat type FB10, 1.12 Volts, 341 Amps, 382 Watts, 1600°C, 0.38mm Tantalum Qty: pkg/3 €198,50

Folded evaporation boat type FB11, 65 x 25mm, 3cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 32mm 9.7mm 8mm 65mm 25mm 14mm 3cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB11Mo-1 Folded evaporation boat type FB11, 1.11 Volts, 118 Amps, 131 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/5 €122,90 72-FB11Mo-2 Folded evaporation boat type FB11, 0.76 Volts, 186 Amps, 141 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/5 €132,30 72-FB11Mo-3 Folded evaporation boat type FB11, 0.71 Volts, 243 Amps, 173 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/5 €151,20 72-FB11Ta-1 Folded evaporation boat type FB11, 2.12 Volts, 137 Amps, 290 Watts, 1600°C, 0.13mm Tantalum Qty: pkg/3 €102,10 72-FB11Ta-2 Folded evaporation boat type FB11, 1.69 Volts, 207 Amps, 350 Watts, 1600°C, 0.25mm Tantalum Qty: pkg/2 €158,80 72-FB11Ta-3 Folded evaporation boat type FB11, 1.45 Volts, 253 Amps, 367 Watts, 1600°C, 0.38mm Tantalum Qty: pkg/3 €226,80

Folded evaporation boat type FB12, 75 x 29mm, 4cc Dimensions: Bl BW H OL W LL Vol. Mat. Thickness 40mm 12.7mm 8mm 75mm 29mm 17.5mm 4cc Mo/Ta/W 0.13/0.25/0.38mm Product # Unit Price* Add to Quote / Order 72-FB12Mo-1 Folded evaporation boat type FB12, 1.20 Volts, 143 Amps, 172 Watts, 1400°C, 0.13mm Molybdenum Qty: pkg/5 €132,30 72-FB12Mo-2 Folded evaporation boat type FB12, 0.88 Volts, 211 Amps, 185 Watts, 1400°C, 0.25mm Molybdenum Qty: pkg/5 €141,80 72-FB12Mo-3 Folded evaporation boat type FB12, 0.83 Volts, 272 Amps, 227 Watts, 1400°C, 0.38mm Molybdenum Qty: pkg/5 €160,70 72-FB12Ta-1 Folded evaporation boat type FB12, 2.00 Volts, 141 Amps, 282 Watts, 1600°C, 0.13mm Tantalum Qty: pkg/3 €124,70 72-FB12Ta-2 Folded evaporation boat type FB12, 1.63 Volts, 200 Amps, 326 Watts, 1600°C, 0.25mm Tantalum Qty: pkg/3 €198,50 72-FB12Ta-3 Folded evaporation boat type FB12, 1.49 Volts, 257 Amps, 383 Watts, 1600°C, 0.38mm Tantalum Qty: pkg/3 €277,80

© Micro to Nano 2024 Website: www.microtonano.com

Micro to Nano BV Tappersweg 91 2031 ET Haarlem Netherlands

Contact - English and German spoken Tel:+31 (0)85 2013155 Info: info@microtonano.com Administration: accounting@microtonano.com

KvK-nr: 90172744 Btw-nr (Tax ID): NL865230900B01 Bankaccount: 0495516724 IBAN: NL32ABNA0495516724 BIC (SWIFT): ABNANL2AMEL