Overview Cressington SEM Sputter & Carbon Coaters
Cressington 108 SEM Sputter Coaters
Cressington 108 SEM Carbon Coaters
Cressington 108 vacuum pumping system
Cressington MTM-10/20 thickness monitor/controller
Sputter targets for Cressington 108 series
Consumables for Cressington coaters, thickness monitors and pumping systems

Cressington Rotary-Tilting and Rotary-Planetary-Tilting sample stages

•              
• R-T40 Stage for 108auto  |
• R-T100 Stage for 108/SE & 208C |
• R-P-T Stage for, 108/SE, 208C & 208HR

Introduction

Motorised Rotary-Tilting (R-T) and Rotary-Planetary-Tilting (RPT) sample stages offer increased uniformity and improved conformal coating of larger samples, high topography samples and multiple samples. They are optionally available for the Cressington coaters:

• R-T40 Rotary-Tilting stagefor the Cressington 108auto sputter coater
• R-T100 Rotary-Tilting stage for the 108auto/SE sputter coater, 108carbon/A/SE carbon coater and 208carbon coater
• R-P-T Rotary-Planetary-Tilting stage for the 108auto/SE sputter coater, 108carbon/A/SE carbon coater, 208HR sputter coaters and 208carbon coaters

They are constructed with an aluminium collar and short glass chamber, enabling them to be drop-in replacements for the standard glass chamber. The electric motor and control are placed outside the vacuum. The motorised samples stage include a 5 step speed control up to 120rpm,  full rocking tilt of 90 degrees both ways and an integrated tilt-lock lever.

Specification of Cressington RT and R-P-T stages

Type	R-T40 stage	R-T100 stage	R-P-T stage
Product #	19-010220	19-012050	19-012080
Compatibility	108auto	108auto/SE 108carbon/A/SE 208carbon	108auto/SE 108carbon/A/SE 208carbon 208HR
Aluminium collar	Ø120 x 76mm	Ø150 x 85mm	Ø150 x 85mm
Glass chamber	Ø120 x 44mm	Ø150 x 65mm	Ø150 x 65mm
Movements	Rotation & tilt	Rotation & tilt	Planetary rotation & tilt
Speed control	Off  + 5 steps to 120 rpm	Off  + 5 steps to 120 rpm	Off  + 5 steps to 120 rpm
Tilting range	+/- 90°	+/- 90°	+/- 90°
Tilt-lock	yes	yes	yes
MTM compatible	yes	yes	yes
Power requirements	9V DC / 100-240VAC	9V DC / 100-240VAC	9V DC / 100-240VAC

 

Cressington R-T40 Rotary-Tilting sample stage

The Cressington R-T40 Rotary-Tilting sample stage has been designed specifically for the 120mm chambers and is compatible with the 108auto SEM sputter coaters. The R-T40 sample stage is supplied with a short glass chamber to reach a total height of 120mm. The R-T40 rotary tilting stage assembly replaces the Ø120x120mm glass chamber and can be field retrofitted to any existing Cressington 108auto sputter coater. It will also fit the JEOL and Agar branded sputter coaters with the Ø120x120mm glass chambers.
The R-T40 stage provides near eucentric tilting for 0-90° in both directions. The rotational speed is controlled by a multi-position switch for up to 120rpm. The standard sample table holds 4 of the 12.7mm pin stubs. Other sample tables are optionally available. For precise thickness measurements the MTM-10 thickness monitor or the MTM-20 thickness controller can be added; the crystal head is at the same height as the sample stubs for increased accuracy. Features and benefits of the R-T40 stage are:

• highly uniform and conformal coatings
• better coverage with thinner coatings
• short coating distance with near eucentric tilt
• rocking tilt from 0 to +/- 90°
• fully compatible with 108auto sputter coaters with Ø120x120mm chamber
• fully compatible with thickness monitoring
• Incl. 9V power supply (100-240V)

Quotation and order information for Cressington R-T40 sample stage

Cressington R-T40 rotary-tilting stage (Ø120mm) for 108auto sputter coater incl. 44mm short glass chamber Product # Description request quote 19-010220 Cressington R-T40 rotary-tilting stage (Ø120mm) for 108auto sputter coater incl. 44mm short glass chamber

R-T sample holder for 1 x Ø30mm / 1-1/4 inch Mounts and Ø32mm SEM stubs , Ø40mm Product # Unit Price* Add to Quote / Order 19-010222 each €80,00 Qty:

R-T sample holder for 4 x 12.7mm pin stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010221 each €80,00 Qty:

R-T sample holder for 3 x Ø15mm Hitachi M4 stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010223 each €110,00 Qty:

R-T sample holder for 4 x Ø10 mm JEOL stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010224 each €110,00 Qty:

R-T sample holder for 3 x Ø12.5 mm JEOL stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010225 each €110,00 Qty:

MTM-10/20 Crystal head bracket for Cressington RT-40 and RT-100 rotary stages Product # Unit Price* Add to Quote / Order 19-010231 each €115,00 Qty:

Cressington R-T100 Rotary-Tilting sample stage for 108/SE and 208 coater

The Cressington R-T100 Rotary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater, 108carbon/A/SE carbon coater and 208carbon coater. The R-T stage with the large 100mm diameter platform enables coating of larger samples with increased uniformity. This larger diameter R-T stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the R-T sample stage. The height of the R-T100 top plate can be adjusted with the telescopic top plate support. Includes large sample holder plate to accommodate a glass slide, multiple pin stubs or optional sample holders. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.

• enables uniform coating of large samples
• wide choice of coating distances
• coating of multiple samples
• compatible with 4” wafers
• compatible with optional thickness monitor
• choice of sample holders
• Incl. 9V power supply (100-240V)

Quotation and order information Cressington R-T100 rotary tilting sample stage and holders

Cressington R-T 100 stage for Ø150mm chambers, incl. 65mm short glass chamber Product # Description request quote 19-012050 Cressington R-T 100 stage for Ø150mm chambers, incl. 65mm short glass chamber

R-T 100 sample holder for 3 x microscope slides or 1 x 4 inch wafer, Ø105 mm diameter Product # Unit Price* Add to Quote / Order 19-012053 each €325,00 Qty:

R-T 100 sample holder for 1 x microscope slides or 1 x 3 inch wafer, Ø80 mm diameter Product # Unit Price* Add to Quote / Order 19-012052 each €280,00 Qty:

R-T 100 sample holder for 2 x geologocal slides 28x48mm, Ø75 mm diameter Product # Unit Price* Add to Quote / Order 19-012054 each €290,00 Qty:

R-T sample holder for 1 x Ø30mm / 1-1/4 inch Mounts and Ø32mm SEM stubs , Ø40mm Product # Unit Price* Add to Quote / Order 19-010222 each €80,00 Qty:

R-T sample holder for 4 x 12.7mm pin stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010221 each €80,00 Qty:

R-T sample holder for 3 x Ø15mm Hitachi M4 stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010223 each €110,00 Qty:

R-T sample holder for 4 x Ø10 mm JEOL stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010224 each €110,00 Qty:

R-T sample holder for 3 x Ø12.5 mm JEOL stubs, Ø40mm Product # Unit Price* Add to Quote / Order 19-010225 each €110,00 Qty:

MTM-10/20 Crystal head bracket for Cressington RT-40 and RT-100 rotary stages Product # Unit Price* Add to Quote / Order 19-010231 each €115,00 Qty:

Cressington R-P-T Rotary-Planetary-Tilting sample stage for 108/SE and 208 coater

The Cressington R-P-T Rotary-Planetary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater, 108carbon/A/SE carbon coater, 208carbon coater and 208HR sputter coater. The 4 planetary sample holder spin on their axis, whilst the larger plate holding the 4 sample holders rotates as well. The R-P-T stage with its 4 planetary sample holders provide excellent conformal and uniform coating of highly topographical samples. This larger diameter R-P-T stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the R-P-T sample stage. The height of the R-P-T top plate can be adjusted with the telescopic top plate support. Includes 4 sample holders, where each sample holder can hold up 6 standard 12.7mm pin stubs. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.

• enables conformal and uniform coating
• wide choice of coating distances
• coating of up to 24 samples
• compatible with 4” wafers
• compatible with optional thickness monitor
• choice of sample holders
• optional adapter plates for large samples
• Incl. 9V power supply (100-240V)

Quotation and order information for Cressington R-P-T sample stage and holders

Cressington R-P-T stage for Ø150mm chambers, incl. 65mm short glass chamber Product # Description request quote 19-012080 Cressington R-P-T stage for Ø150 mm chambers, incl. 65mm short glass chamber

R-P-T sample holder for 6 x Ø12.7mm standard pin stubs Product # Unit Price* Add to Quote / Order 19-012081 each €105,00 Qty:

R-P-T sample holder for 3 x Ø12.7mm standard pin stubs or 3 x Ø15mm Hitachi M4 stubs Product # Unit Price* Add to Quote / Order 19-012088 each €115,00 Qty:

R-P-T sample holder for 4 x Ø10mm JEOL stubs Product # Unit Price* Add to Quote / Order 19-012087 each €105,00 Qty:

R-P-T sample holder for 1 x Ø25mm / 1 inch sample stubs or mounts Product # Unit Price* Add to Quote / Order 19-012082 each €105,00 Qty:

R-P-T sample holder for 1 x Ø32mm / 1-1/4 inch sample stubs or mounts Product # Unit Price* Add to Quote / Order 19-012083 each €105,00 Qty:

Adapter from Ø32mm to Ø25 mm for the 19-012083 R-P-T sample holder Product # Unit Price* Add to Quote / Order 19-012089 each €95,00 Qty:

R-P-T sample holder for 4 x Ø12.5mm JEOL sample stubs Product # Unit Price* Add to Quote / Order 19-012084 each €185,00 Qty:

RPT sample holder for Ø40mm / 1-1/2inch mounts Product # Unit Price* Add to Quote / Order 19-012086 each €125,00 Qty:

R-P-T sample holder for 4 x Ø 15mm Hitachi M4 mounts Product # Unit Price* Add to Quote / Order 19-012085 each €185,00 Qty:

RPT Adapter plate holder for 2x microscope slides up to 25.4 x 76.2mm (1inch x 3inch), mounted on central spindle Product # Unit Price* Add to Quote / Order 19-012072 each €240,00 Qty:

RPT Adapter plate holder for 2x geological slides up to 48x28mm, mounted on central spindle Product # Unit Price* Add to Quote / Order 19-012073 each €245,00 Qty:

RPT Adapter plate holder for 4inch wafer, mounted on central spindle Product # Unit Price* Add to Quote / Order 19-012074 each €350,00 Qty:

RPT Adapter with M4 screw to mount EM-Tec sample holders with M4 threaded hole, mounted on central spindle Product # Unit Price* Add to Quote / Order 11-012070 each €59,50 Qty:

MTM-10/20 Crystal head bracket for Cressington R-P-T stage Product # Unit Price* Add to Quote / Order 19-012091 each €115,00 Qty:

Replacement Switch/PCB for Cressington R-P-T and R-T stages Product # Unit Price* Add to Quote / Order 19-012099 each €265,00 Qty:

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