R D Mathis folded baffled box evaporation sources
larger capacity folded baffled box evaporation sources made from Ta & Mo


Introduction

Tantalum evaporation source SB4, 76 x 25 x 9.5mm trough,  102mm L x 25mm W
Example of folded baffled box evaporation sources
 

The folded baffled box evaporation sources are manufactured by folding the tantalum or molybdenum foil into an evaporation boat with separate baffle sheets and covers with holes. These folded baffled box sources are ideal for higher volumes of materials and can be used by themselves of with baffle and cover to reduce the amount of particles in the vapor stream. The baffled box source prevents materials from spitting onto the substrate. The folded baffled box evaporation sources are available in Tantalum and Molybdenum with different foil thickness (0.13 and 0.25mm). They are used as direct resistive heating sources for upwards evaporation, i.e. the substrates are mounted above the source.


Dimensions of the folded baffled box evaporation sources

P/N

Bl

W

H

OL

P = Holes in cover

Vol.

Mat.

Thickness

72-SB7

44mm

25mm

19mm

89mm

60 x Ø1.5mm / 4 x 15 rows

21cc

Ta/Mo

0.13/0.25mm

72-SB8

44mm

38mm

25mm

89mm

60 x Ø1.5mm / 5 x 15 rows

43cc

Ta/Mo

0.13/0.25mm

72-SB9

76mm

35mm

19mm

121mm

115 x Ø1.5mm / 5 x 23 rows

50cc

Ta/Mo

0.13/0.25mm

72-SB10

70mm

52mm

32mm

102mm

65 x Ø3mm / 5 x 13 rows

112cc

Ta/Mo

0.13/0.25mm


The folded baffled box sources are suitable for:

  • Evaporants which tends to spit or release particles during the evaporation process
  • Thin film evaporation processes for metalising surfaces
  • Production cycles with larger amount of evaporant
  • A wide variety of materials
  • Higher rated power sources
  • R & D and product development applications


Ordering information for folded baffled boat evaporation sources:


*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Folded baffle box evaporation source type SB7, 89 x 25mm, 21cc
Folded baffle box evaporation source type SB7, 89 x 25mm, 21cc

Dimensions:

Bl

W

H

OL

Holes

Vol.

Mat.

Thickness

44mm

25mm

19mm

89mm

60 x Ø1.5mm 4 x 15 rows

21cc

Ta/Mo

0.13/0.25mm


 
Product # Unit Price* Add to Quote / Order
72-SB7ATa-1 Tantalum evaporation boat SB7A, 2.28 Volts, 572 Amps, 1304 Watts, 1600⁰ C Temp, 21 cc, 0.13mm Ta
Qty:

each €103,50
72-SB7ATa-2 Tantalum evaporation boat SB7A, 2.10 Volts, 680 Amps, 1428 Watts, 1600⁰ C Temp, 21 cc, 0.25mm Ta
Qty:

each €187,50
72-SB7BTa-1 Tantalum baffle cap SB7BTa for evaporation boat SB7ATa, 2.28 Volts, 572 Amps, 1304 Watts, 1600⁰ C Temp, 0.13mm T Tantalum
Qty:

each €37,50
72-SB7CTa-1 Multi hole tantalum cap SB7CTa for evaporation source SB7A, 60 x Ø1.5mm holes, 2.28 Volts, 572 Amps, 1304 Watt, 1600 °C, 0.13mm T Tantalum
Qty:

each €55,50
72-SB7AMo-1 Molybdenum evaporation boat SB7A, 1.21 Volts, 547 Amps, 662 Watts, 1400⁰ C Temp, 21 cc, 0.13mm Mo
Qty:

each €39,00
72-SB7AMo-2 Molybdenum evaporation boat SB7A, 1.08 Volts, 705 Amps, 761 Watts, 1400⁰ C Temp, 21 cc, 0.25mm Mo
Qty:

each €48,00
72-SB7BMo-1 Molybdenum baffle cap SB7BMo for evaporation boat SB7BMo, 1.21 Volts, 547 Amps, 662 Watts, 1400⁰ C Temp, 0.13mm T Mo
Qty:

each €21,00
72-SB7CMo-1 Multi hole molybdenum cap SB7CMo for evaporation source SB7C, 60 x Ø1.5mm holes, 1.21 Volts, 547 Amps, 662 Watt, 1400 °C, 0.13mm T Mo
Qty:

each €37,50


Folded baffle box evaporation source type SB8, 89 x 38mm, 43cc
Folded baffle box evaporation source type SB8, 89 x 38mm, 43cc

Dimensions:

Bl

W

H

OL

Holes

Vol.

Mat.

Thickness

44mm

38mm

25mm

89mm

60 x Ø1.5mm 5 x 15 rows

43cc

Ta/Mo

0.13/0.25mm


 
Product # Unit Price* Add to Quote / Order
72-SB8ATa-1 Tantalum evaporation boat SB8A, 2.51 Volts, 880 Amps, 2209 Watts, 1600⁰ C Temp, 43 cc, 0.13mm Ta
Qty:

each €148,50
72-SB8ATa-2 Tantalum evaporation boat SB8A, 2.36 Volts, 115 Amps, 2631 Watts, 1600⁰ C Temp, 43 cc, 0.25mm Ta
Qty:

each €232,05
72-SB8BTa-1 Tantalum baffle cap SB8BTa for evaporation boat SB8ATa, 2.51 Volts, 880 Amps, 2209 Watts, 1600⁰ C Temp, 0.13mm T Tantalum
Qty:

each €51,00
72-SB8CTa-1 Multi hole tantalum cap SB7CTa for evaporation source SB8A, 60 x Ø1.5mm holes, 2.51 Volts, 880 Amps, 2209 Watt, 1600 °C, 0.13mm T Tantalum
Qty:

each €69,00
72-SB8AMo-1 Molybdenum evaporation boat SB8A, 1.44 Volts, 850 Amps, 1224 Watts, 1400⁰ C Temp, 43 cc, 0.13mm Mo
Qty:

each €46,50
72-SB8AMo-2 Molybdenum evaporation boat SB8A, 1.39 Volts, 1042 Amps, 1448 Watts, 1400⁰ C Temp, 43 cc, 0.25mm Mo
Qty:

each €57,00
72-SB8BMo-1 Molybdenum baffle cap SB7BMo for evaporation boat SB8BMo, 1.44 Volts, 850 Amps, 1224 Watts, 1400⁰ C Temp, 0.13mm T Mo
Qty:

each €24,00
72-SB8CMo-1 Multi hole molybdenum cap SB8CMo for evaporation source SB8C, 60 x Ø1.5mm holes, 1.44 Volts, 850 Amps, 1224 Watt, 1400 °C, 0.13mm T Mo
Qty:

each €49,50


Folded baffle box evaporation source type SB9, 121 x 35mm, 50cc
Folded baffle box evaporation source type SB9, 121 x 35mm, 50cc

Dimensions:

Bl

W

H

OL

Holes

Vol.

Mat.

Thickness

76mm

35mm

19mm

121mm

115 x Ø1.5mm 5 x 23 rows

50cc

Ta/Mo

0.13/0.25mm


 
Product # Unit Price* Add to Quote / Order
72-SB9ATa-1 Tantalum evaporation boat SB9A, 3.44 Volts,750 Amps, 2580 Watts, 1600⁰ C Temp, 50 cc, 0.13mm Ta
Qty:

each €159,00
72-SB9ATa-2 Tantalum evaporation boat SB9A, 3.40 Volts, 998 Amps, 3393 Watts, 1600⁰ C Temp, 50 cc, 0.25mm Ta
Qty:

each €285,00
72-SB9BTa-1 Tantalum baffle cap SB9BTa for evaporation boat SB9ATa, 3.44 Volts, 750 Amps, 2580 Watts, 1600⁰ C Temp, 0.13mm T Tantalum
Qty:

each €55,50
72-SB9CTa-1 Multi hole tantalum cap SB9CTa for evaporation source SB9A, 60 x Ø1.5mm holes, 3.44 Volts, 750 Amps, 2580 Watt, 1600 °C, 0.13mm T Tantalum
Qty:

each €85,50
72-SB9AMo-1 Molybdenum evaporation boat SB9A, 1.87 Volts, 731 Amps, 1367 Watts, 1400⁰ C Temp, 50 cc, 0.13mm Mo
Qty:

each €51,00
72-SB9AMo-2 Molybdenum evaporation boat SB9A, 1.62 Volts, 890 Amps, 1442 Watts, 1400⁰ C Temp, 50 cc, 0.25mm Mo
Qty:

each €61,50
72-SB9BMo-1 Molybdenum baffle cap SB7BMo for evaporation boat SB9BMo, 1.87 Volts, 731 Amps, 1367 Watts, 1400⁰ C Temp, 0.13mm T Mo
Qty:

each €31,50
72-SB9CMo-1 Multi hole molybdenum cap SB9CMo for evaporation source SB9C, 60 x Ø1.5mm holes, 1.87 Volts, 731 Amps, 1367 Watt, 1400 °C, 0.13mm T Mo
Qty:

each €54,00


Folded baffle box evaporation source type SB10, 102 x 51mm, 112cc
Folded baffle box evaporation source type SB10, 102 x 51mm, 112cc

Dimensions:

Bl

W

H

OL

Holes

Vol.

Mat.

Thickness

70mm

51mm

32mm

102mm

65 x Ø3mm 5 x 13 rows

112cc

Ta/Mo

0.13/0.25mm


 
Product # Unit Price* Add to Quote / Order
72-SB10ATa-1 Tantalum evaporation boat SB10A, 3.66 Volts, 1220 Amps, 4465 Watts, 1600⁰ C Temp, 112 cc, 0.13mm Ta
Qty:

each €223,50
72-SB10ATa-2 Tantalum evaporation boat SB10A, 3.37 Volts, 1550 Amps, 5224 Watts, 1600⁰ C Temp, 112 cc, 0.25mm Ta
Qty:

each €403,50
72-SB10BTa-1 Tantalum baffle cap SB10BTa for evaporation boat SB10ATa, 3.66 Volts, 1220 Amps, 4465 Watts, 1600⁰ C Temp, 0.13mm T Tantalum
Qty:

each €73,50
72-SB10CTa-1 Multi hole tantalum cap SB10CTa for evaporation source SB10A, 60 x Ø1.5mm holes, 3.66 Volts, 1220 Amps, 4465 Watt, 1600 °C, 0.13mm T Tantalum
Qty:

each €100,50
72-SB10AMo-1 Molybdenum evaporation boat SB10A, 2.11 Volts, 1222 Amps, 2578 Watts, 1400⁰ C Temp, 112 cc, 0.13mm Mo
Qty:

each €69,00
72-SB10AMo-2 Molybdenum evaporation boat SB10A, 2.02 Volts, 1530 Amps, 3091 Watts, 1400⁰ C Temp, 112 cc, 0.25mm Mo
Qty:

each €82,50
72-SB10BMo-1 Molybdenum baffle cap SB10BMo for evaporation boat SB10BMo, 2.11 Volts, 1222 Amps, 2578 Watts, 1400⁰ C Temp, 0.13mm T Mo
Qty:

each €33,00
72-SB10CMo-1 Multi hole molybdenum cap SB10CMo for evaporation source SB10C, 60 x Ø1.5mm holes, 2.11 Volts, 1222 Amps, 2578 Watt, 1400 °C, 0.13mm T Mo
Qty:

each €67,50




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