R D Mathis Micro-Electronic evaporation sources
compact, low power and efficient thermal evaporation sources



Introduction

The Micro-Electronic sources represent a full line of compact and efficient thermal evaporation sources which originate from the extensive selection of the R.D. Mathis standard size thermal evaporation sources. The overall length of the Micro-Electronics sources is less than 50mm, which makes them compatible with many smaller thermal vacuum evaporation systems. The Micro-Electronics line of evaporation sources includes baffled box sources, boats, filaments, crucible heaters and covered boat sources. They are suitable for evaporation of metals, alloys, and compounds. For all theses sources, the power requirements are published so it is easy to match them with the available power source. The smaller Micro-Electronics sources are ideal for:

  • lower power systems
  • systems with smaller vacuum chambers
  • thin film processes that require small amounts of evaporant
  • small amounts of expensive materials
  • R & D and product development applications
  • sample preparation applications
The material of choice for these sources is tungsten, but the evaporation boats are also available in tantalum and molybdenum


Ordering information for low power micro-electronics evaporation sources

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Micro-Electronics evaporation source ME1, Tungsten 0.005 Inch/0.127mm
Micro-Electronics evaporation source ME1, Tungsten 0.005 Inch/0.127mm
Product # Unit Price* Add to Quote / Order
71-ME1W Evaporation source 1.45 Volts, 266 Amps, 386 Watts, 1600⁰ C Temp, Approx. 2g, Tungsten
Qty:

each €119,90

Micro-Electronics evaporation source ME2, Tantalum 0.005 Inch/0.127mm
Micro-Electronics evaporation source ME2, Tantalum 0.005 Inch/0.127mm
Product # Unit Price* Add to Quote / Order
71-ME2Ta Evaporation source 2.52 Volts, 141 Amps, 355 Watts, 1600⁰ C Temp, 1.1 cm3, Tantalum
Qty:

pkg/3 €76,50
71-ME2ATa Single hole cap for evaporation source ME2, Tantalum
Qty:

pkg/3 €58,50
71-ME2BTa Multi hole cap for evaporation source ME2, Tantalum
Qty:

pkg/3 €67,50

Micro-Electronics evaporation source ME3, 0.005 inch/0.127mm
Micro-Electronics evaporation source ME3, 0.005 inch/0.127mm
Product # Unit Price* Add to Quote / Order
71-ME3W Evaporation source 2 Volts, 202 Amps, 404 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten
Qty:

pkg/5 €37,00
71-ME3Ta Evaporation source 1.77 Volts, 138 Amps, 244 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum
Qty:

pkg/5 €76,50
71-ME3Mo Evaporation source 0.94 Volts, 150 Amps, 141 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum
Qty:

pkg/5 €34,00

Micro-Electronics evaporation source ME4
Micro-Electronics evaporation source ME4
Product # Unit Price* Add to Quote / Order
71-ME4W Evaporation source 1.83 Volts, 143 Amps, 262 Watts, 1800⁰ C Temp, 0.1 cm3, Tungsten
Qty:

pkg/5 €28,50
71-ME4Ta Evaporation source 1.5 Volts, 98 Amps, 147 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum
Qty:

pkg/5 €55,50
71-ME4Mo Evaporation source 0.94 Volts, 93 Amps, 87 Watts, 1400⁰ C Temp, 0.1 cm3, Molybdenum
Qty:

pkg/5 €25,50

Micro-Electronics evaporation source ME5
Micro-Electronics evaporation source ME5
Product # Unit Price* Add to Quote / Order
71-ME5W Evaporation source 1.69 Volts, 80 Amps, 135 Watts, 1800⁰ C Temp, 0.033 cm3, Tungsten
Qty:

pkg/5 €26,50
71-ME5Ta Evaporation source 1.4 Volts, 55 Amps, 77 Watts, 1600⁰ C Temp, 0.033 cm3, Tantalum
Qty:

pkg/5 €47,50
71-ME5Mo Evaporation source 0.85 Volts, 58 Amps, 49 Watts, 1400⁰ C Temp, 0.033 cm3, Molybdenum
Qty:

pkg/5 €22,00

Micro-Electronics evaporation source ME6A
Micro-Electronics evaporation source ME6A
Product # Unit Price* Add to Quote / Order
71-ME6AW Evaporation source 1.83 Volts, 145 Amps, 265 Watts, 1800⁰ C Temp, 0.5 cm3, Tungsten
Qty:

pkg/5 €31,50
71-ME6ATa Evaporation source 1.85 Volts, 95 Amps, 175 Watts, 1600⁰ C Temp, 0.5 cm3, Tantalum
Qty:

pkg/5 €53,50
71-ME6AMo Evaporation source 0.85 Volts, 102 Amps, 87 Watts, 1400⁰ C Temp, 0.5 cm3, Molybdenum
Qty:

pkg/5 €27,00

Micro-Electronics evaporation source ME6B
Micro-Electronics evaporation source ME6B
Product # Unit Price* Add to Quote / Order
71-ME6BW Evaporation source 1.88 Volts, 144 Amps, 271 Watts, 1800⁰ C Temp, 0.2 cm3, Tungsten
Qty:

pkg/5 €31,50
71-ME6BTa Evaporation source 1.73 Volts, 96 Amps, 166 Watts, 1600⁰ C Temp, 0.2 cm3, Tantalum
Qty:

pkg/5 €53,50
71-ME6BMo Evaporation source 0.9 Volts, 97 Amps, 87 Watts, 1400⁰ C Temp, 0.2 cm3, Molybdenum
Qty:

pkg/5 €27,00

Micro-Electronics evaporation source ME7
Micro-Electronics evaporation source ME7
Product # Unit Price* Add to Quote / Order
71-ME7W Evaporation source 2.03 Volts, 7 Amps, 154 Watts, 1800⁰ C Temp, 0.033 cm3, Tungsten
Qty:

pkg/5 €24,50
71-ME7Ta Evaporation source 1.72 Volts, 49 Amps, 84 Watts, 1600⁰ C Temp, 0.33 cm3, Tantalum
Qty:

pkg/5 €53,50
71-ME7Mo Evaporation source 1.12 Volts, 53 Amps, 59 Watts, 1400⁰ C Temp, 0.033 cm3, Molybdenum
Qty:

pkg/5 €27,00

Micro-Electronics evaporation source ME8
Micro-Electronics evaporation source ME8
Product # Unit Price* Add to Quote / Order
71-ME8W Evaporation source 2.57 Volts, 129 Amps, 332 Watts, 1800⁰ C Temp, 0.2 cm3, Tungsten
Qty:

pkg/5 €34,00
71-ME8Ta Evaporation source 2.16 Volts, 93 Amps, 201 Watts, 1600⁰ C Temp, 0.2 cm3, Tantalum
Qty:

pkg/5 €63,00
71-ME8Mo Evaporation source 1.04 Volts, 79 Amps, 82 Watts, 1400⁰ C Temp, 0.2 cm3, Molybdenum
Qty:

pkg/5 €30,50

Micro-Electronics evaporation source ME9
Micro-Electronics evaporation source ME9
Product # Unit Price* Add to Quote / Order
71-ME9W Evaporation source 1.55 Volts, 97 Amps, 150 Watts, 1800⁰ C Temp, 0.1 cm3, Tungsten
Qty:

pkg/5 €38,00
71-ME9Ta Evaporation source 1.48 Volts, 67 Amps, 99 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum
Qty:

pkg/5 €78,00
71-ME9Mo Evaporation source 0.8 Volts, 72 Amps, 58 Watts, 1400⁰ C Temp, 0.1 cm3, Molybdenum
Qty:

pkg/5 €35,00

Micro-Electronics evaporation source ME10, Tantalum 0.005 Inch/0.127mm
Micro-Electronics evaporation source ME10, Tantalum 0.005 Inch/0.127mm
Product # Unit Price* Add to Quote / Order
71-ME10Ta Evaporation source 1.07 Volts, 131 Amps, 140 Watts, 1600⁰ C Temp, Tantalum
Qty:

pkg/3 €99,00

Micro-Electronics evaporation filament source ME11, Tungsten
Micro-Electronics evaporation filament source ME11, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME11W Evaporation filament 3.59 Volts, 25 Amps, 90 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €33,00
71-ME11W3 Evaporation filament 3,13 Volts, 44 Amps, 138 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €36,00

Micro-Electronics evaporation filament source ME12, Tungsten
Micro-Electronics evaporation filament source ME12, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME12W Evaporation filament 2.47 Volts, 27 Amps, 67 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €31,50
71-ME12W3 Evaporation filament 2.3 Volts, 47 Amps, 108 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €33,00

Micro-Electronics evaporation filament source ME13A, Tungsten
Micro-Electronics evaporation filament source ME13A, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME13AW Evaporation filament 1.25 Volts, 33 Amps, 41 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €31,50
71-ME13AW3 Evaporation filament 1.08 Volts, 61 Amps, 66 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €33,00

Micro-Electronics evaporation filament source ME13B, Tungsten
Micro-Electronics evaporation filament source ME13B, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME13BW Evaporation filament 1.95 Volts, 27 Amps, 53 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €34,50
71-ME13BW3 Evaporation filament 1.68 Volts, 52 Amps, 87 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €36,00

Micro-Electronics evaporation filament source ME13C, Tungsten
Micro-Electronics evaporation filament source ME13C, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME13CW Evaporation filament 1.95 Volts, 26 Amps, 51 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €36,00
71-ME13CW3 Evaporation filament 1.56 Volts, 53 Amps, 83 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €37,50

Micro-Electronics evaporation filament source ME14, Tungsten
Micro-Electronics evaporation filament source ME14, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME14W Evaporation filament 3.21 Volts, 24 Amps, 77 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/5 €36,75
71-ME14W3 Evaporation filament 2.9 Volts, 36 Amps, 104 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/5 €39,75

Micro-Electronics evaporation filament source ME15, Tungsten
Micro-Electronics evaporation filament source ME15, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME15W Evaporation filament 4.18 Volts, 23 Amps, 96 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/5 €43,50
71-ME15W3 Evaporation filament 3.63 Volts, 34 Amps, 123 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/5 €45,75

Micro-Electronics evaporation filament source ME16A, Tungsten
Micro-Electronics evaporation filament source ME16A, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME16AW Evaporation filament 2.48 Volts, 23 Amps, 57 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €33,00
71-ME16AW3 Evaporation filament 2.3 Volts, 39 Amps, 90 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €34,50

Micro-Electronics evaporation filament source ME16B, Tungsten
Micro-Electronics evaporation filament source ME16B, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME16BW Evaporation filament 2.9 Volts, 23 Amps, 67 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €34,50
71-ME16BW3 Evaporation filament 2.66 Volts, 42 Amps, 112 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €36,00

Micro-Electronics evaporation filament source ME16C, Tungsten
Micro-Electronics evaporation filament source ME16C, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME16CW Evaporation filament 3.77 Volts, 23 Amps, 87 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €34,50
71-ME16CW3 Evaporation filament 3.54 Volts, 43 Amps, 152 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €36,00

Micro-Electronics evaporation filament source ME16D, Tungsten
Micro-Electronics evaporation filament source ME16D, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME16DW Evaporation filament 5.96 Volts, 21 Amps, 125 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €37,50
71-ME16DW3 Evaporation filament 5.51 Volts, 40 Amps, 220 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €43,50

Micro-Electronics evaporation filament source ME16E, Tungsten
Micro-Electronics evaporation filament source ME16E, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME16EW Evaporation filament 4.25 Volts, 32 Amps, 136 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €36,00
71-ME16EW3 Evaporation filament 5.0 Volts, 44 Amps, 220 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €37,50

Micro-Electronics evaporation filament source ME17, Tungsten
Micro-Electronics evaporation filament source ME17, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME17W Evaporation filament 4,93 Volts, 22 Amps, 108 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €52,50
71-ME17W3 Evaporation filament 4.57 Volts, 40 Amps, 183 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €55,50

Micro-Electronics heating filament ME18A for crucible C1 , Tungsten
Micro-Electronics heating filament ME18A for crucible C1 , Tungsten
Product # Unit Price* Add to Quote / Order
71-ME18AW Heating filament for crucible C1, 6.56 Volts, 48 Amps, 315 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €52,50
71-ME18AW3 Heating filament for crucible C1, 5.0 Volts, 55 Amps, 275 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €55,50

Micro-Electronics heating filament ME18B for crucible C9 , Tungsten
Micro-Electronics heating filament ME18B for crucible C9 , Tungsten
Product # Unit Price* Add to Quote / Order
71-ME18BW Heating filament for crucible C9, 4.7 Volts, 43 Amps, 202 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm
Qty:

pkg/10 €52,50
71-ME18BW3 Heating filament for crucible C9, 4.25 Volts, 56 Amps, 238 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm
Qty:

pkg/10 €55,50

Micro-Electronics shielded crucible heater ME19 for crucibles C1 and C9, Tungsten
Micro-Electronics shielded crucible heater ME19 for crucibles C1 and C9, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME19W Shielded crucible heater for crucible C1 & C9, 1.26 Volts, 257 Amps, 324 Watts, 1600⁰ C Temp, Tungsten
Qty:

each €105,00

Micro-Electronics shielded crucible heater ME20 for crucibles C10, Tungsten
Micro-Electronics shielded crucible heater ME20 for crucibles C10, Tungsten
Product # Unit Price* Add to Quote / Order
71-ME20W Shielded crucible heater for crucble C10, 1.16 Volts, 169 Amps, 196 Watts, 1600⁰ C Temp, Tungsten
Qty:

each €105,00

Micro-Electronics evaporation source ME21
Micro-Electronics evaporation source ME21
Product # Unit Price* Add to Quote / Order
71-ME21W Evaporation source 1.96 Volts, 213 Amps, 417 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten
Qty:

pkg/5 €43,50
71-ME21Ta Evaporation source 1.75 Volts, 141 Amps, 247 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum
Qty:

pkg/5 €116,25
71-ME21Mo Evaporation source 0.94 Volts, 147 Amps, 138 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum
Qty:

pkg/5 €37,50

Micro-Electronics evaporation source ME22, Tantalum 0.005 Inch/0.127mm
Micro-Electronics evaporation source ME22, Tantalum 0.005 Inch/0.127mm
Product # Unit Price* Add to Quote / Order
71-ME22ATa Single hole cap for evaporation source ME22, Tantalum
Qty:

pkg/3 €33,00
71-ME22BTa Multi hole cap for evaporation source ME22, Tantalum
Qty:

pkg/3 €39,00
71-ME22Ta Evaporation source 1.87 Volts, 196 Amps, 367 Watts, 1600⁰ C Temp, 2.5 cm3, Tantalum
Qty:

each €43,50

Micro-Electronics evaporation source ME23
Micro-Electronics evaporation source ME23
Product # Unit Price* Add to Quote / Order
71-ME23W Evaporation source 1.4 Volts, 327 Amps, 458 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten
Qty:

pkg/5 €77,00
71-ME23Ta Evaporation source 1.51 Volts, 215 Amps, 325 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum
Qty:

pkg/5 €146,50
71-ME23Mo Evaporation source 0.79 Volts, 251 Amps, 198 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum
Qty:

pkg/5 €78,00

Micro-Electronics evaporation source ME24
Micro-Electronics evaporation source ME24
Product # Unit Price* Add to Quote / Order
71-ME24W Evaporation source 1.66 Volts, 322 Amps, 535 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten
Qty:

pkg/5 €79,00
71-ME24Ta Evaporation source 1.47 Volts, 230 Amps, 338 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum
Qty:

pkg/5 €146,50
71-ME24Mo Evaporation source 0.83 Volts, 248 Amps, 206 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum
Qty:

pkg/5 €77,00



SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
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  FEI Volumescope Pins
  SEM Stub Storage Boxes
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Instruments

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Cryo Supplies

  Cryo Grid Boxes
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FIB Supplies

  FIB Lift-out Grids
  FIB Low Profile Stubs
  FIB Grid Holders
  FIB Pre-tilt Holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
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  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies

  Bullseye Vacuum Gauges
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  Vacuum Sealant
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Sample Coating Supplies

  Sputter Targets
  Carbon Rods & Fibers
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  SEM Sample Coating Fluid

Evaporation Supplies

  Thermal Evaporation Sources
  Evaporation Materials
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
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  Cleaning / Gloves
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  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
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Light Microscopy

  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
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  Plastic Transfer Pipettes
  Optical Lens Tissue
  Glass Petri Dishes