The EM-Tec 108 sputter coating system is a compact and low cost solution for gold coating of non-conductive sample for table top SEM’s. Most table top SEM’s are easy to use and are equipped with essential features. They are mostly used for low to medium magnifications and require minimal operator training. Although some table top SEM’s can cope with non-conductive samples, image quality greatly improves when non-conductive samples are coated with Gold or Platinum. For the table top SEM and standard SEM used with medium magnification range a special EM-Tec 108 sputter coating system has been configured. This configuration uses air as process gas so no Argon is needed. The use of air makes operation easier and quicker. The EM-Tec 108 sputter coating system includes the Cressington 108manual sputter coater the Value VRI-4 dual stage rotary vacuum pump, all metal vacuum connections, oil mist filter and a Gold sputter target. The pressure can be set at a desired vacuum level. Timer and sputter current can be adjusted to get the desired coating thickness.
Sputter process
The sputter process includes the following steps and takes only about 1 to 2 minutes:
The EM-Tec 108 sputter coating system for table top SEM features:
Specifications of the EM-Tec 108 sputter coating system for table top SEM’s:
Sputter Coater |
Cressington 108manual #19-010100 |
Sputter current |
0-40 mA |
Digital timer |
5-300 seconds |
Vacuum setting |
Precision needle valve |
Venting |
Manual on top plate |
Sample chamber |
Ø120 x 120 mm, |
Sample height adjustment |
60 mm |
Sample table size |
Ø60 mm |
Target size |
Ø57 x 0.1 mm |
Target materials |
Au or Pt |
Sputter gas |
Air |
Sputter Pressure range |
0.05 – 1 mbar |
Vacuum pump |
Value VRI-4 #60-004040 |
Vacuum connections |
All metal KF16 vacuum hardware |
Oil mist filter |
EM-Tec ME16 #64-003122 |
Power |
400W / 230V / 50Hz |
|
|
|