EM-Tec Checkerboard Calibration Standard for SEM imaging
quick and easy full image magnification calibration

EM-Tec Checkerboard Calibration Standard for SEM imaging

EM-Tec Checkerboard Calibration Standard for SEM imaging

The EM-Tec Checkerboard calibration standard has been developed for quick and easy magnification and image calibration of SEMs and compact SEMs. It consists of over 1.6 million Squares which form 4 stages of checkerboard patterns. The smallest checkerboard is 10 x 10 um. These smallest checkerboards then form a pattern of 100 x 100 um and these again form checkerboards of 1 x 1 mm. The 1 x 1 mm checkerboards then form a 5 x 5 mm pattern.
The smallest 1 x 1 um squares are made with 20nm thick Chromium and 40nm Gold on the Cr, deposited on an ultra-flat conductive Boron doped <100> silicon substrate. These materials are deemed inert under normal working conditions. Imaging contrast is good for both SE and BSE imaging, especially at lower keV. The EM-Tec Checkerboard calibration sample is suitable for SEM magnification calibration in the range of 20x to 50,000x with a pitch accuracy of ± 0.1% in both X and Y direction. Also useful for checking of image distortions and the accuracy of (motorized) SEM stages.
The EM-Tec Checkerboard calibration standard is NIST traceable. Example of wafer level certificate of traceability which is supplied with each EM-Tec Checkerboard calibration standard.

Features of the EM-Tec Checkerboard Calibration standard

  • Quick and easy magnification calibration and image check
  • Feature sizes: 1mm, 100um, 10um and 1 um
  • Pitch accuracy ± 0.1% in X and Y directions
  • Ideal for SEM and compact SEM
  • Excellent contrast with SE and BSE, also at lower KeV
  • NIST traceable
  • Large 5 x 5 mm checkerboard
  • Die size is 6 x 6 mm with a thickness of 675 um
  • Substrate B-doped <100> silicon with 5-10 ohm-cm resistivity
  • Pattern made with 40nm Gold over 20nm thick Chrome
  • Long life construction with virtually inert materials

The EM-Tec EDX-Checkerboard calibration standard is available unmounted and mounted on popular SEM stubs.

EM-Tec Checkerboard Calibration Standard for SEM imaging
Bright Cr-squares of the 1um checker-board pattern in SE-image
Line profile of SE signal intensity showing clear sharp edges of the 1 um squares

Ordering EM-Tec EDX-Checkerboard calibration standard

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
EM-Tec Checkerboard calibration standard EM-Tec Checkerboard calibration standard
Product # Unit Price* Add to Quote / Order
31-T37000-U EM-Tec Checkerboard calibration standard, unmounted

each €585,00
31-T37000-1 EM-Tec Checkerboard calibration standard, mounted on a standard Ø12.7 mm pin stub

each €595,00
31-T37000-2 EM-Tec Checkerboard calibration standard, mounted on a Zeiss Ø12.7 mm pin stub

each €595,00
31-T37000-6 EM-Tec Checkerboard calibration standard, mounted on a Ø12.2 mm JEOL stub

each €612,50
31-T37000-8 EM-Tec Checkerboard calibration standard, mounted on a Ø15 mm Hitachi M4 stub

each €595,00


SEM Supplies

TEM Supplies


Sample Preparation


  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM Series Supplies
  Field & Lab Sampler Kits
  FlowView liquid sample Kit


  Acoustic Enclosures
  Cressington SEM coaters
  TEM Sample Prep
  Diaphragm Pump
  Rotary vacuum Pump
  Precision diamond saw  
  TEM Grids
  TEM Support Films
  Silicon Nitride Films
  K-Kit Wet Cell Holder
  Graphene Films
  TEM Grid Boxes
  Cryo Grid Boxes
  TEM Sample Staining
  3mm Embedding Tubes
  Eyelash Manipulators

Cryo Supplies

  Cryo Grid Boxes
  Other Cryo Supplies

FIB Supplies

  FIB Lift-out Grids
  FIB Low Profile Stubs
  FIB Grid Holders
  FIB Pre-tilt Holders
  FIB Pre-tilt stubs
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies

  Vacuum Gauges
  KF/NW Vacuum Parts
  KF/NW Vacuum Hoses
  ISO Vacuum flange parts
  Vacuum Oil and Grease
  Vacuum Sealant
  Diaphragm Pump
  Rotary vacuum Pump
  Vacuum Sample Storage
  Vacuum Pick-Up Pens

Sample Coating Supplies

  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  SEM Sample Coating Fluid

Evaporation Supplies

  Thermal Evaporation Sources
  Evaporation Materials
  Supports & Substrates
  SEM Preparation Stands
  Probes & Picks
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes & Tabs
  Non-Conductive Adhesives
  Sample Storage
  Hand Tools
  Sorting Wire Mesh
  Preparation Surfaces
  Cleaning / Gloves
  Conductive Metal Powders
  Metallographic Sample Prep
  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Nano-Tec Mica Discs
  HOPG Substrates

Light Microscopy

  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black Metal Slides
  Slide Storage Boxes
  LM Calibration
  Plastic Transfer Pipettes
  Optical Lens Tissue
  Glass Petri Dishes
  Digital Microscope
  PTFE Beakers