SEM Calibration Standards
Standard SEM pin stubs

EM-Tec SEM Resolution Test Standard

•                                                       
• Order Gold particles on carbon   |
  • EM-Tec Au on C resolution standard 1, 5-200nm
  • EM-Tec Au on C resolution standard 2, 30-300nm
  • EM-Tec Au on C resolution standard 3, 3-50nm
  • EM-Tec Au on C resolution standard 4, 2-30nm
• Order Tin spheres on carbon 
  • EM-Tec Sn on C resolution standard 6, 5nm-30um
  • EM-Tec Sn on C resolution standard 7, 10-100nm

Introduction

Quality resolution standards are essential tools for obtaining optimum resolution, settings, beam size and astigmatism correction on SEM, CD-SEMs, FESEMs, FIB, Microprobe, Auger and SIMS systems. The industry standards are:

• Gold particles on a carbon substrate
• Tin spheres on a carbon substrate.

Gold particles on carbon have rich features and provide excellent signal strength for secondary electron (SE) imaging. They are equally suitable for low voltage backscatter electron (BSE) imaging. The nearly perfect round tin spheres have an easy to recognize shape and can be used where gold is not tolerated. Multiple particle sizes are offered for different imaging applications. The carbon substrates are all 6mm in diameter and 2mm in height.

EM-Tec gold on carbon resolution standards

The gold particles on the gold on carbon resolution test specimens provide relatively sharp features, dispersed individual particles and excellent contrast against the carbon substrate. There are 4 different sizes of EM-Tec gold on carbon resolution test specimens available:

• EM-Tec 1 with Au particles ranging from 5-200nm. Ideal for resolution testing on standard SEMs. Use at 15,000x magnification or higher.
• EM-Tec 2 with Au particles ranging from 30-300nm. This calibration specimen has been developed for low kV and medium magnifications resolution testing. Note the nice twin features on the Au particles. Use at 10,000x magnification or higher.
• EM-Tec 3 with Au particles ranging from 3-50nm for high resolution testing  of SEMs and FESEMs. Use at 50,000x magnification or higher.
• EM-Tec 4 with Au particles ranging from 2-30nm for ultra-high resolution testing of FESEMs. Use at 100,000x magnification or higher.

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The EM-Tec resolution standards are available unmounted or ready mounted on popular SEM stubs. Full list of available specimen mounts for calibration standard and test specimens.

EM-Tec tin on carbon resolution standards

Tin spheres on carbon provide an excellent test specimen to determine the resolution of SEM, FESEM, FIB, CD-SEM, Microprobe, Auger and SIMS systems. The nearly perfect round spheres in various sizes are especially suitable for determining image quality, brightness & contrast (grey levels), optimum probe size and astigmatism correction. Tin on carbon is used where gold on carbon is not allowed in the SEM. The shape of the round spheres are easy to recognize and easier to use than gold on carbon. However, the overall signal level is lower than that of gold on carbon test specimens. There are two sizes of tin spheres resolution calibration standards available:

• EM-Tec 6 with Sn spheres ranging from 5nm – 30μm. This resolution standard covers a wide magnification range and is also useful for the medium and lower magnification range, starting at around 100x. Also useful at lower kV ranges due to the larger spheres. Start at lower magnification and zoom in on the smaller spheres at (much) higher magnifications.
• EM-Tec 7 with Sn spheres ranging from 10-100nm. Excellent test specimen for high resolution SEMs and FESEMs with a nice smooth layer of Sn spheres. Use at 30,000x magnification or higher.

The EM-Tec resolution standards are available unmounted or ready mounted on popular SEM stubs. Full list of available specimen mounts for calibration standard and test specimens.

Ordering information for EM-Tec gold on carbon resolution standards

EM-Tec Au on C resolution standard 1, 5-200nm Gold on carbon resolution test standard with gold particles on a carbon substrate. The gold particles size ranges from 5-200nm. The carbon substrate is 6mm diameter with 2mm height. Gold provides excellent SE signal whereas the dark carbon background separates the individual gold particles. Feature rich gold particles are ideal for resolution testing on standard SEMs. Use with a magnification of 15,000x or higher. Ideally suited to correct distortion, astigmatism and image shift and to adjust for correct focus, beam size, contrast and brightness. This resolution standard has a square mesh grid pattern to facilitate locating and positioning. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-021100-U EM-Tec Au on C resolution standard 1, 5-200nm, unmounted Qty: each €179,75 31-021100-1 EM-Tec Au on C resolution standard 1, 5-200nm, mounted on Ø12.7mm pin stub Qty: each €179,75 31-021100-2 EM-Tec Au on C resolution standard 1, 5-200nm, mounted on Ø12.7mm Zeiss pin stub Qty: each €179,75 31-021100-6 EM-Tec Au on C resolution standard 1, 5-200nm, mounted on Ø12.2mm JEOL stub Qty: each €179,75 31-021100-8 EM-Tec Au on C resolution standard 1, 5-200nm, mounted on Ø15mm Hitachi stub Qty: each €179,75

EM-Tec Au on C resolution standard 2, 30-300nm Gold on carbon resolution test standard with larger gold particles on a carbon substrate. The gold particles size ranges from 30-300nm. The carbon substrate is 6mm diameter with 2mm height. The larger gold particles provide excellent SE signal whereas the dark carbon background separates the individual gold particles. The feature rich larger gold particles are ideal for low kV and medium maginfication range. Use with a magnification of 10,000x or higher. Ideally suited to correct distortion, astigmatism and image shift and to adjust for correct focus, beam size, contrast and brightness. This resolution standard has a square mesh grid pattern to facilitate locating and positioning. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-021200-U EM-Tec Au on C resolution standard 2, 30-300nm, unmounted Qty: each €195,25 31-021200-1 EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø12.7mm pin stub Qty: each €195,25 31-021200-2 EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø12.7mm Zeiss pin stub Qty: each €195,25 31-021200-6 EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø12.2mm JEOL stub Qty: each €195,25 31-021200-8 EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø15mm Hitachi stub Qty: each €195,25

EM-Tec Au on C resolution standard 3, 3-50nm Gold on carbon resolution test standard with fine gold particles on a carbon substrate. The gold particles size ranges from 3-50nm. The carbon substrate is 6mm diameter with 2mm height. The fine gold provides excellent SE signal whereas the dark carbon background separates the individual gold particles. The finer gold particles are ideal for high resolution testing on standard SEMs and FESEMs. Use with a magnification of 50,000x or higher. Ideally suited to astigmatism and image shift and to adjust for correct focus, beam size, contrast and brightness for high resolution imaging. This resolution standard has a square mesh grid pattern to facilitate locating and positioning. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-021300-U EM-Tec Au on C resolution standard 3, 3-50nm, unmounted Qty: each €419,75 31-021300-1 EM-Tec Au on C resolution standard 3, 3-50nm, mounted on Ø12.7mm pin stub Qty: each €419,75 31-021300-2 EM-Tec Au on C resolution standard 3, 3-50nm, mounted on Ø12.7mm Zeiss pin stub Qty: each €419,75 31-021300-6 EM-Tec Au on C resolution standard 3, 3-50nm, mounted on Ø12.2mm JEOL stub Qty: each €419,75 31-021300-8 EM-Tec Au on C resolution standard 3, 3-50nm, mounted on Ø15mm Hitachi stub Qty: each €419,75

EM-Tec Au on C resolution standard 4, 2-30nm Gold on carbon resolution test standard with finer gold particles on a carbon substrate. The gold particles size ranges from 2-30nm. The carbon substrate is 6mm diameter with 2mm height. The finer gold provides excellent SE signal whereas the dark carbon background separates the individual gold particles. The finer gold particles are ideal for ultra high resolution testing on FESEMs. Use with a magnification of 100,000x or higher. Ideally suited to correct astigmatism and image shift and to adjust for correct focus, beam size, contrast and brightness for ultra high resolution imaging. This resolution standard has a square mesh grid pattern to facilitate locating and positioning. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-021400-U EM-Tec Au on C resolution standard 4, 2-30nm, unmounted Qty: each €419,75 31-021400-1 EM-Tec Au on C resolution standard 4, 2-30nm, mounted on Ø12.7mm pin stub Qty: each €419,75 31-021400-2 EM-Tec Au on C resolution standard 4, 2-30nm, mounted on Ø12.7mm Zeiss pin stub Qty: each €419,75 31-021400-6 EM-Tec Au on C resolution standard 4, 2-30nm, mounted on Ø12.2mm JEOL stub Qty: each €419,75 31-021400-8 EM-Tec Au on C resolution standard 4, 2-30nm, mounted on Ø15mm Hitachi stub Qty: each €419,75

Ordering Information for EM-Tec tin on carbon resolution standards

EM-Tec Sn on C resolution standard 6, 5nm-30um Tin on carbon resolution test specimen with tin spheres on carbon substrate. The tin sphere size range is 5nm – 30um. Carbon substrate size is 6mm diameter with 2mm height. Due to the large range of sphere sizes this test specimen is ideally suited for a wide range of magnifications and operating voltage. Can be used from low magnifications as low as 100x and zoom in on the smaller spheres for higher magnifications. The nearly perfect round spheres make it easy to Ideal for for resolution testing on standard SEMs. Use at 15,000x magnification or higher. Easy to use resolution specimen for standard SEMs, table top SEMs and training purposes. Excellent tool to test performance and optimize your SEM after a filament change. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-022100-U EM-Tec Sn on C resolution standard 6, 5nm-30um,unmounted Qty: each €312,00 31-022100-1 EM-Tec Sn on C resolution standard 6, 5nm-30um, mounted on Ø12.7mm pin stub Qty: each €312,00 31-022100-2 EM-Tec Sn on C resolution standard 6, 5nm-30um, mounted on Ø12.7mm Zeiss pin stub Qty: each €312,00 31-022100-6 EM-Tec Sn on C resolution standard 6, 5nm-30um, mounted on Ø12.2mm JEOL stub Qty: each €312,00 31-022100-8 EM-Tec Sn on C resolution standard 6, 5nm-30um, mounted on Ø15mm Hitachi stub Qty: each €312,00

EM-Tec Sn on C resolution standard 7, 10-100nm Tin on carbon resolution test specimen with tin spheres on a carbon substrate The tin sphere size range is 10-100nm. Carbon substrate size is 6mm diameter with 2mm height. The nearly perfect round spheres make it easy to correct distortion, astigmatism and image shift and to adjust for correct contrast and brightness. This resolution standard has a relative smooth layer and is intended for use at higher magnifications; 30,000x and higher on standard SEMs and FESEMs. This resolution standard has a square mesh grid pattern to facilitate locating and positioning. Available unmounted or mounted on the most popular SEM stubs. If you work with multiple SEM platforms, look at our SEM stub adapter page. The SEM stub adapters enable you to use a single resolution standard on all SEMs. Product # Unit Price* Add to Quote / Order 31-022300-U EM-Tec Sn on C resolution standard 7, 10-100nm,unmounted Qty: each €224,00 31-022300-1 EM-Tec Sn on C resolution standard 7, 10-100nm,mounted on Ø12.7mm pin stub Qty: each €224,00 31-022300-2 EM-Tec Sn on C resolution standard 7, 10-100nm, mounted on Ø12.7mm Zeiss pin stub Qty: each €224,00 31-022300-6 EM-Tec Sn on C resolution standard 7, 10-100nm, mounted on Ø12.2mm JEOL stub Qty: each €224,00 31-022300-8 EM-Tec Sn on C resolution standard 7, 10-100nm, mounted on Ø15mm Hitachi stub Qty: each €224,00

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