Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard


Introduction
                 31-T33600   Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field
                 31-T33600 Micro-Tec MTC-5 Multiple target
                 calibration standard with 4 patterns, Bright Field
                 view magnification of this image, with details

The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging,  optical quality control systems and low magnification SEM imaging for:

  • magnification calibration
  • critical dimension measurements
  • distortion correction
  • imaging quality assessment
  • quality control measurements.

There are four distinct patterns on the MTC-5 calibration standard:

  • Circle patterns from 5µm to 5mm diameter
  • Square patterns from 5 x 5µm to 5x5mm
  • Hexagon patterns from 5µm to 5mm across
  • Cross scale pattern of 5x5mm with 0.002mm divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of traceability is supplied with each standard. The MTC-5 is available in two versions:

  • MTC-5 with Cr lines on silicon for bright field imaging
  • MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging with smallest feature 10µm

Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:

Substrate 525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent; 5-10 Ohm resistivity
Patterns Circles, squares, hexagons, cross scale
Pattern size 5 x 5mm (4x)
Lines 

75nm thick, pure bright Chromium lines/features (measure center to center)

1µm wide lines  5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95 and 100µm apart
5µm wide lines spaced 125 and 150µm apart
10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart
20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart
Cross scale
pattern
5mm wide lines, 5 x 5mm with 0.002mm divisions
Die size 12 x 12mm
Application Reflective light, scanning electron microscopy, optical imaging systems
Identification Product ID with serial number etched
Mounting Unmounted, mounting optionally available
Supplied Supplied in a Gel-Pak box


Ordering Information for MTC-5 Multiple Target Graticule Calibration Standards

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field
Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field The Micro-Tec MTC-5F bright field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5F has been designed for calibrating reflective light microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5F incorporates four distinct patterns:
Circle patterns from 5µm to 5mm diameter
Square patterns from 5x5µm to 5x5mm
Hexagon patterns from 5µm to 5mm across
Cross scale patterns of 5x5mm with 0.002mm divisions

The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns.

The Micro-Tec MTC-5F is a NIST traceable standard.

Example of wafer level certificate of traceability for the Micro-Tec MTC-5F multiple target calibration standard.
Product # Unit Price* Add to Quote / Order
31-T33600-U Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, unmounted
Qty:

each €197,50
31-T33600-3 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub
Qty:

each €209,50
31-T33600-7 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub
Qty:

each €209,50
31-T33600-9 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub
Qty:

each €209,50
31-T33600-11 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on black microscope slide
Qty:

each €209,50


Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field
Micro-Tec MTCD-5  Multiple target calibration standard with 4 patterns, Dark Field The MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are:
Inverted circle patterns from 10µm to 5mm diameter
Inverted square patterns from 10x10µm to 5x5mm
Inverted hexagon patterns from 10µm to 5mm across
Inverted cross scale patterns of 5x5mm with 0.01mm divisions.

The Micro-Tec MTCD-5 is a NIST traceable standard.

Example of wafer level certificate of traceability for the Micro-Tec MTCD-5 dark field multiple target calibration standard.

Note: The images here show the features in bright lines. The actual standard shows the features in dark lines.
Product # Unit Price* Add to Quote / Order
31-T33700-U Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, unmounted
Qty:

each €197,50
31-T33700-3 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub
Qty:

each €209,50
31-T33700-7 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub
Qty:

each €209,50
31-T33700-9 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub
Qty:

each €209,50
31-T33700-11 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on black microscope slide
Qty:

each €209,50
31-T33700-10 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on custom specimen stub
Qty:

each €286,50




SEM Supplies

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