Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard


Introduction
                 31-T33600   Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field
                 31-T33600 Micro-Tec MTC-5 Multiple target
                 calibration standard with 4 patterns, Bright Field
                 view magnification of this image, with details

The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging,  optical quality control systems and low magnification SEM imaging for:

  • magnification calibration
  • critical dimension measurements
  • distortion correction
  • imaging quality assessment
  • quality control measurements.

There are four distinct patterns on the MTC-5 calibration standard:

  • Circle patterns from 5µm to 5mm diameter
  • Square patterns from 5 x 5µm to 5x5mm
  • Hexagon patterns from 5µm to 5mm across
  • Cross scale pattern of 5x5mm with 0.002mm divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of traceability is supplied with each standard. We offer:

  • MTC-5 with Cr lines on silicon for bright field imaging

Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:

Substrate 525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent; 5-10 Ohm resistivity
Patterns Circles, squares, hexagons, cross scale
Pattern size 5 x 5mm (4x)
Lines 

75nm thick, pure bright Chromium lines/features (measure center to center)

1µm wide lines  5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95 and 100µm apart
5µm wide lines spaced 125 and 150µm apart
10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart
20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart
Cross scale
pattern
5mm wide lines, 5 x 5mm with 0.002mm divisions
Die size 12 x 12mm
Application Reflective light, scanning electron microscopy, optical imaging systems
Identification Product ID with serial number etched
Mounting Unmounted, mounting optionally available
Supplied Supplied in a Gel-Pak box


Ordering Information for MTC-5 Multiple Target Graticule Calibration Standards

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field
Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, Bright Field The Micro-Tec MTC-5F bright field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5F has been designed for calibrating reflective light microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5F incorporates four distinct patterns:
Circle patterns from 5µm to 5mm diameter
Square patterns from 5x5µm to 5x5mm
Hexagon patterns from 5µm to 5mm across
Cross scale patterns of 5x5mm with 0.002mm divisions

The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns.

The Micro-Tec MTC-5F is a NIST traceable standard.

Example of wafer level certificate of traceability for the Micro-Tec MTC-5F multiple target calibration standard.
Product # Unit Price* Add to Quote / Order
31-T33600-U Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, unmounted
Qty:

each €197,50
31-T33600-3 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub
Qty:

each €209,50
31-T33600-7 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub
Qty:

each €209,50
31-T33600-9 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub
Qty:

each €209,50
31-T33600-11 Micro-Tec MTC-5F Multiple target calibration standard with 4 patterns, mounted on black microscope slide
Qty:

each €209,50




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM Series Supplies
  Field & Lab Sampler Kits
  FlowView liquid sample Kit

Instruments

  Acoustic Enclosures
  Cressington SEM coaters
  TEM Sample Prep
  Diaphragm Pump
  Rotary vacuum Pump
  Precision diamond saw  
  TEM Grids
  TEM Support Films
  Silicon Nitride Films
  K-Kit Wet Cell Holder
  Graphene Films
  TEM Grid Boxes
  Cryo Grid Boxes
  TEM Sample Staining
  3mm Embedding Tubes
  Filaments/Cathodes
  Eyelash Manipulators

Cryo Supplies

  Cryo Grid Boxes
  Other Cryo Supplies

FIB Supplies

  FIB Lift-out Grids
  FIB Low Profile Stubs
  FIB Grid Holders
  FIB Pre-tilt Holders
  FIB Pre-tilt stubs
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies

  Vacuum Gauges
  KF/NW Vacuum Parts
  KF/NW Vacuum Hoses
  ISO Vacuum flange parts
  Vacuum Oil and Grease
  Vacuum Sealant
  Diaphragm Pump
  Rotary vacuum Pump
  Vacuum Sample Storage
  Vacuum Pick-Up Pens

Sample Coating Supplies

  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  SEM Sample Coating Fluid

Evaporation Supplies

  Thermal Evaporation Sources
  Evaporation Materials
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes & Tabs
  Non-Conductive Adhesives
  Sample Storage
  Hand Tools
  Sorting Wire Mesh
  Preparation Surfaces
  Cleaning / Gloves
  Conductive Metal Powders
  Metallographic Sample Prep
  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Nano-Tec Mica Discs
  HOPG Substrates

Light Microscopy

  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black Metal Slides
  Slide Storage Boxes
  LM Calibration
  Plastic Transfer Pipettes
  Optical Lens Tissue
  Glass Petri Dishes
  Digital Microscope
  PTFE Beakers