Micro-Tec Multiple Target Calibration Standards
EM-Tec LAMC-15 large area magnification calibration standard
EM-Tec 1µm and 10µm grid pattern calibration standards

Micro-Tec Individual Graticule Calibration Standards
ideal for low magnifications, large areas, microscope stages and digital imaging systems

•                                                                
• Order Micro-Tec Individual Graticule Calibration Standards  
  • CCS-1 Micro-Tec 1mm cross scale, 0.01mm div., Si/Cr, opaque
  • CCS-5 Micro-Tec 5mm cross scale, 0.01mm div., Si/Cr, opaque
  • CCS-10 Micro-Tec 10mm cross scale, 0.01mm div., Si/Cr, opaque
  • LCS-10 Micro-Tec 10mm linear compound scale, 1, 0.1, 0.01mm div., Si/Cr, opaque
  • CCS-2.5 Micro-Tec 1inch cross scale, 0.001inch div., Si/Cr, opaque

Introduction

The new and innovative Micro-Tec individual graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Cr lines. They are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec graticule calibration standards provide high contrast images for ease of calibration. Each of the calibration standards has a unique product ID and serial number etched on the die. Each of the Micro-Tec graticule calibration standard is fully NIST traceable and are supplied with a certificate of traceability.  The Micro-Tec graticule calibration standards are ideally suited for:

• reflective light microscopes
• stereo microscopes
• optical magnifiers
• low magnification SEM
• digital imaging systems
• quality control measurements

The Micro-Tec family of silicon based graticules for bright-field application consists of:

• CCS-1       1mm cross scale pattern with 0.01mm divisions
• CCS-5       5mm cross scale pattern with 0.01mm divisions
• CCS-10    10mm cross scale pattern with 0.01mm divisions
• LCS-10     10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions
• CCS-2.5   1 inch cross scale pattern with 0.001inch divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

General specifications for  all Micro-Tec graticule standards:

Substrate	525µm thick boron doped ultra-flat wafer with <100> orientation
Conductivity	Excellent, 5-10 Ohm resistivity
Lines	75nm thick, 5.0µm wide pure Chromium lines
Identification	Product ID with serial number etched
Certification	Wafer level certificate of traceability to NIST certified standard
Mounting	Unmounted standard or mounted on black metal slide
Supplied	Supplied in a Gel-Pak box or on black metal slide

Specifications for the individual Micro-Tec graticule calibration standards

Product #	Name	Pattern size	Units / Div	Die size	Traceable	Mounting
31-T33100	Micro-Tec CCS-1	1mm cross	0.01mm	3.5x3.5mm	Yes, NIST	Optional
31-T33200	Micro-Tec CCS-5	5mm cross	0.01mm	6.0x6.0mm	Yes, NIST	Optional
31-T33300	Micro-Tec CCS-10	10mm cross	0.01mm	12.0x12.0mm	Yes, NIST	Optional
31-T33400	Micro-Tec LCS-10	10mm long	1.0/0.1/0.01mm	6.0x12.0mm	Yes, NIST	Optional
31-T33500	Micro-Tec CCS-2.5	1 inch cross	0.001inch	3.5x3.5mm	Yes, NIST	Optional

 

An alternative calibration standard is the MTC-5 multiple target calibration standards with cross scale pattern, circles, squares and hexagons. Covers both magnification calibration and images distortion assessments. Available for both brightfield and darkfield applications.

Ordering Information

CCS-1 Micro-Tec 1mm cross scale, 0.01mm div., Si/Cr, opaque The Micro-Tec CCS-1 is a 1mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 3.5 x 3.5mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications. Example of Certificate of Traceability for Micro-Tec CCS-1. Product # Unit Price* Add to Quote / Order 31-T33100-U CCS-1 Micro-Tec 1mm cross scale, 0.01mm div., Si/Cr, opaque, unmounted Qty: each €49,50 31-T33100-11 CCS-1 Micro-Tec 1mm cross scale, 0.01mm div., Si/Cr, opaque, mounted on a black metal slide Qty: each €59,50

CCS-5 Micro-Tec 5mm cross scale, 0.01mm div., Si/Cr, opaque The Micro-Tec CCS-5 is a 5mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 6x6mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications. Example of Certificate of Traceability for Micro-Tec CCS-5. Product # Unit Price* Add to Quote / Order 31-T33200-U CCS-5 Micro-Tec 5mm cross scale, 0.01mm div., Si/Cr, opaque, unmounted Qty: each €97,50 31-T33200-11 CCS-5 Micro-Tec 5mm cross scale, 0.01mm div., Si/Cr, opaque, mounted on a black metal slide Qty: each €107,25

CCS-10 Micro-Tec 10mm cross scale, 0.01mm div., Si/Cr, opaque The Micro-Tec CCS-10 is a 10mm cross scale with 0.01mm divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 12x12mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications. Example of Certificate of Traceability for Micro-Tec CCS-10. Product # Unit Price* Add to Quote / Order 31-T33300-U CCS-10 Micro-Tec 10mm cross scale, 0.01mm div., Si/Cr, opaque, unmounted Qty: each €179,50 31-T33300-11 CCS-10 Micro-Tec 10mm cross scale, 0.01mm div., Si/Cr, opaque, mounted on a black metal slide Qty: each €189,50

LCS-10 Micro-Tec 10mm linear compound scale, 1, 0.1, 0.01mm div., Si/Cr, opaque The Micro-Tec LCS-10 is a 10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions. 0 to 9mm show divisons of 0.1mm, 9 to 10mm includes additional divisions of 0.01mm. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Die size is 6x12mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications. Example of Certificate of Traceability for Micro-Tec LCS-10 . Product # Unit Price* Add to Quote / Order 31-T33400-U LCS-10 Micro-Tec 10mm linear compound scale, 1, 0.1, 0.01mm div., Si/Cr, opaque, unmounted Qty: each €112,50 31-T33400-11 LCS-10 Micro-Tec 10mm linear compound scale, 1, 0.1, 0.01mm div., Si/Cr, opaque, mounted on a black metal slide Qty: each €122,50

CCS-2.5 Micro-Tec 1inch cross scale, 0.001inch div., Si/Cr, opaque The Micro-Tec CCS-2.5 is a 1 inch cross scale with 0.001 inch divisions. 75nm thick bright chrome lines on conductive ultra-flat silicon substrate. Useful for calibration application for US or inch based products. Die size is 3.5x3.5mm. Each calibration standard has the product ID with an unique serial number etched in the standard. Intended for reflected light microscopy, stereo microscopy, digital imaging systems and low magnification SEM applications. Example of Certificate of Traceability for Micro-Tec CCS-2.5 . Product # Unit Price* Add to Quote / Order 31-T33500-U CCS-2.5 Micro-Tec 1inch cross scale, 0.001inch div., Si/Cr, opaque, unmounted Qty: each €49,50 31-T33500-11 CCS-2.5 Micro-Tec 1inch cross scale, 0.001inch div., Si/Cr, opaque, mounted on a black metal slide Qty: each €59,50

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