EM-Tec wafer holders for SEM
compatible with either wafers with a flat or with a notch



Introduction

The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes of 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass.


Unique features of the EM-Tec wafer holders:

  1. low profile, weight balanced support disc
  2. square cut-outs for wafer tweezers
  3. adjustable spring tension
  4. adjustable for non-standard wafers
  5. self-lubricating locking slide
  6. compatible with either wafers with a notch or wafers with a flat
  7. compatible with EM-Tec stage adapters for all SEM platforms

Available with:

  • standard pin to fit on SEMs which use the standard pin; FEI, Philips, Zeiss, LEO, Leica, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
  • M4 threaded hole; compatible with Hitachi SEMs, FESEMs and table top SEMs and with the EM-Tec versatile SEM stage adapters
  • Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adapters with a Ø14mm connection

Capacity and dimensions for the  EM-Tec wafer holders:

Product #

Type

Wafer sizes

Dimensions w/o pin

Securing methode

SEM stage comp.

12-000282

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000382

W2

51mm / 2”

Ø76x18mm

Springloaded slide

M4 thread

12-000682

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000293

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000393

W3

76mm / 3”

Ø76x18mm

Springloaded slide

M4 thread

12-000693

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000284

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Standard 3.2mm pin

12-000384

W4

100mm / 4”

Ø106x16mm

Springloaded slide

M4 thread

12-000684

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Ø14mm JEOL stub

12-000286

W6

150/mm / 6”

Ø156x16mm

Springloaded slide

Standard 3.2mm pin

12-000386

W6

150mm / 6”

Ø156x16mm

Springloaded slide

M4 thread

12-000686

W6

150mm / 6”

Ø156x16mm

Springloaded slide

Ø14mm JEOL stub

12-000288

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Standard 3.2mm pin

12-000388

W8

200mm / 8”

Ø206x16mm

Springloaded slide

M4 thread

12-000688

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Ø14mm JEOL stub



Ordering Information for EM-Tec wafer holders for SEMs using pin stubs; TFS, FEI, Philips, Tescan, Phenom, Aspex, RJLee, AmRay, Cambridge Instruments, Leica and CamScan SEMs

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, pin EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, pin
Product # Unit Price* Add to Quote / Order
12-000282 each €279,50
Qty:

 

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, pin EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, pin
Product # Unit Price* Add to Quote / Order
12-000293 each €279,50
Qty:

 

EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, pin EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, pin
Product # Unit Price* Add to Quote / Order
12-000284 each €299,50
Qty:

 

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, pin EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, pin
Product # Unit Price* Add to Quote / Order
12-000286 each €329,50
Qty:

 

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, pin EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, pin
Product # Unit Price* Add to Quote / Order
12-000288 each €349,50
Qty:

 

Ordering Information for EM-Tec wafer holders for Hitachi SEMs and the versatile EM-Tec stage SEM stage adapters

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, M4 EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, M4
Product # Unit Price* Add to Quote / Order
12-000382 each €275,00
Qty:

 

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, M4 EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, M4
Product # Unit Price* Add to Quote / Order
12-000393 each €275,00
Qty:

 

EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, M4 EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, M4
Product # Unit Price* Add to Quote / Order
12-000384 each €295,00
Qty:

 

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, M4 EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, M4
Product # Unit Price* Add to Quote / Order
12-000386 each €325,00
Qty:

 

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, M4 EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, M4
Product # Unit Price* Add to Quote / Order
12-000388 each €345,00
Qty:

 

Ordering Information for EM-Tec wafer holders for JEOL stage SEM stage adapters with 14mm connection

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, Ø14mm JEOL stub EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, Ø14mm JEOL stub
Product # Unit Price* Add to Quote / Order
12-000682 each €279,50
Qty:

 

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, Ø14mm JEOL stub EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, Ø14mm JEOL stub
Product # Unit Price* Add to Quote / Order
12-000693 each €279,50
Qty:

 

EM-Tec W4 wafer holder for Ø100mm / 4 inch wafers, Ø14mm JEOL stub EM-Tec W4 wafer holder for Ø100mm / 4 inch wafers, Ø14mm JEOL stub
Product # Unit Price* Add to Quote / Order
12-000684 each €299,50
Qty:

 

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, Ø14mm JEOL stub EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, Ø14mm JEOL stub
Product # Unit Price* Add to Quote / Order
12-000686 each €329,50
Qty:

 

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, Ø14mm JEOL stub EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, Ø14mm JEOL stub
Product # Unit Price* Add to Quote / Order
12-000688 each €349,50
Qty:

 



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