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Kimball LaB6 cathodes for SEM and TEM
High brightness, direct replacement electron sources


Kimball LaB6 cathodes for SEM and TEM
Kimball LaB6 cathodes for SEM and TEM


Introduction

The Kimball LaB6 filaments are the industry standard, high quality LaB6 cathodes. The standard LaB6 cathode comprises a 90° tip angle and a 15µm flat made from a <100> oriented single crystal. This provides a long lifetime, high brightness source coupled with excellent stability.  The special version with sharper 60° tip angle and smaller 6µm flat is available for TEMs.
Kimball Physics uses the purest, high quality LaB6 crystals for the Kimball ES-423E LaB6 cathodes. The standard Kimball LaB6 tip provides a 10x higher brightness as the standard tungsten source, resulting in better resolution with clear images and less noise. The lifetime of an LaB6 cathode is much longer than a tungsten source providing a stable source over a longer period.
See the electron source performance table for more details.

 

The Kimball LaB6 cathodes improve results when used for:

  • SEM for low voltage and long term EDS mapping applications
  • TEM imaging and analysis
  • Electron probe micro analyzers (EPMA or Microprobe)
  • E-beam lithography

The Kimball LaB6 cathodes are available with three types of LaB6 tips

The Kimball LaB6 cathodes are available with three types of LaB6 tips:

1 – Standard tip with 90° cone and 15 µm micro-flat for standard SEM and standard TEM applications
2 – Long life, high stability tip with 90° cone and 20 µm micro-flat for Microprobes and analytical SEM applications
3 – High brightness, sharp tip with 60° cone and 6 µm micro-flat for high resolution TEM applications

LaB6 sources require a higher vacuum than standard tungsten sources which generally requires an additional ion-getter pump at the electron source. The required vacuum is in the 10-7 mbar range.

 

Design and features of the Kimball ES-423E LaB6 cathodes

Kimball-ES-423E-LaB6-EM-cathodes-for-SEM-and-TEM-tipThe Kimball Physics ES-423E (extended life) LaB6 cathode is a high performance, resistively heated, thermionic electron source. It is based on a well proven carbon rod heater structure with improved stability, improved reliability and less exposure of the LaB6 crystal to reduce contamination of the Wehnelt aperture. There is heating current through the LaB6 crystal; there are no high-temperature current carrying joints. The LaB6 crystal is held in place by a carbon ferrule. The design results in a small physical size which fits most Wehnelt cylinder with ease.   Benefits of this unique construction are:

  • Suitable for SEM, TEM, Microprobes and E-Beam lithography systems
  • Resistively, indirectly heated high purity LaB6 crystal, resulting in lower heating current
  • High thermal stability to eliminate drift problems
  • Carbon ferrule with less exposure of LaB6 crystal to reduce Wehnelt contamination
  • low vapour pressure with reduced evaporation loss
  • High brightness; about 10x higher than tungsten filaments (even 20x for the sharper tips)
  • Stable sources; due to its sturdy construction, the standard Kimball LaB6 cathodes comprise a stability of better than 3%/hour at 1550°C
  • Long life; at 10-7mbar vacuum and 1550°C operating temperature, >500 hours lifetime can be expected for the standard Kimball ES-423E LaB6 cathode
  • Low work function of 2.66ev (compared to 4.7ev for tungsten)

Further details and specifications of the Kimball ES423E LaB6 can be found in the PDF: Kimball ES-423E extended life LaB6 cathode specifications

 

Specifications of the different Kimball ES-423E LaB6 cathodes

Please consult the following table for the correct type of Kimball LaB6 source or cathode for your SEM, TEM or Microprobe. The Kimball Physics LAB6 cathodes are available for Thermo, FEI, Hitachi, JEOL, Amray, CamScan, ISI, ABT, Topcon, Philips, Tescan, Zeiss, LEO, Leica, Cambridge Instruments and Leica electron microscopes.

Type

Standard tip

Long life, high stability tip

High brightness sharp tip

Tip shape

90°tip angle with 15µm flat

90°tip angle with 20µm flat

60°tip angle with 6µm flat

Brightness
Value

10x times than tungsten tip
1 x 106 A/cm2.Str

2 x less than standard tip
0.5 x 106 A/cm2.Str

2x times than standard tip
2 x 106 A/cm2.Str

Saturation

Mono spot at around 1550°C

Mono spot at around 1550°C

Mono spot at around 1550°C

Crossover

Small; 7-10µm

Small; 7-10µm

Small; 7-10µm

Angular distribution

Sharp; 1.6 x 10-2 rad

Sharp; 1.6 x 10-2 rad

Sharp; 1.6 x 10-2 rad

Lifetime

Long > 500 hrs

Longer than standard tip

Shorter than standard tip

Ease of operation

Moderate

Easy, due to larger spot

Difficult, due smaller spot

Stability

High, better than 3%/hr

High, better than 3%/hr

Lower, due to smaller spot

Vacuum

10-7 mbar or better

10-7 mbar or better

10-7 mbar or better

Work function

2.66 ev

2.66 ev

2.66 ev

Application

SEM & TEM

Analytical SEM / Microprobe

TEM

 

Kimball ES-423E LaB6 cathode selection table

Electron Microscope Type or Filament base

Product number

Ceramic Disc mm

Pin Diameter  mm

Pin Pitch mm

AEI

14-AE3501

12.0

1.0

6.45

AmRay /AMR (except 1200 series)

14-AM3502

26.0

1.0

5.0

Cambridge Instruments (except S4-10)

14-AE3501

12.0

1.0

6.45

CamScan with AEI conversion

14-AE3501

12.0

1.0

6.45

FEI TEM and SEM

14-FP3503 / 14-FP3568

26.0

1.0

5.0

Hitachi S-Type

14-HI3504

9.8

1.2

2.7

JEOL K-Type metal ring – SEM – standard tip

14-JL3508

28.0

1.2

8.0

JEOL K-Type metal ring – TEM – sharp tip

14-JL3568

28.0

1.2

8.0

Leica

14-AE3501

12.0

1.0

6.45

LEO 400 and 1400 Series SEM

14-AE3501

12.0

1.0

6.45

LEO1450 (except AEI conversions)

14-ZS3510

19.8

1.0

5.0

LEO TEM

14-ZS3560

19.8

1.0

5.0

Philips SEM and TEM (except XL-30)

14-FP3503 / 14-FP3563

26.0

1.0

5.0

Philips XL-30 SEM

14-AE3501

12.0

1.0

6.45

Tescan

14-TN3509

19.8

1.0

5.0

Thermo Sem and TEM

14-FP3503 / 14-FP3563

26.0

1.0

5.0

Zeiss DSM SEM and TEM

14-ZS3510 / 14-ZS3560

19.8

1.0

5.0



Ordering information for the Kimball ES-423E standard LaB6 cathode with 90° cone and 15 µm micro-flat suitable for most SEM and TEM applications

*Prices are without tax. Tax might be added in cart.

Kimball ES-423E LaB6 cathode, AEI Base, 90 degrees/15µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs Kimball ES-423E LaB6 cathode, AEI Base, 90 degrees/15µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs
Product # Unit Price* Add to Quote / Cart
14-AE3501 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, AmRay base, 90 degrees/15µm round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie Kimball ES-423E LaB6 cathode, AmRay base, 90 degrees/15µm round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie
Product # Unit Price* Add to Quote / Cart
14-AM3502 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, FEI/Philips base, 90 degrees/15µm round tip for Thermo & FEI TEM/SEM and Philips EM200 TEM & PSEM 500 and later (except XL-30) Kimball ES-423E LaB6 cathode, FEI/Philips base, 90 degrees/15µm round tip for Thermo & FEI TEM/SEM and Philips EM200 TEM & PSEM 500 and later (except XL-30)
Product # Unit Price* Add to Quote / Cart
14-FP3503 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 90 degrees/15µm round tip for Hitachi S-, SU, H- and X-Series SEM and TEM Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 90 degrees/15µm round tip for Hitachi S-, SU, H- and X-Series SEM and TEM
Product # Unit Price* Add to Quote / Cart
14-HI3504 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 90 degrees/15µm round tip for ISI / ABT / Topcon SEM and TEM Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 90 degrees/15µm round tip for ISI / ABT / Topcon SEM and TEM
Product # Unit Price* Add to Quote / Cart
14-I23506 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, JEOL K-Type base, 90 degrees/15µm round tip for SEM and TEM Kimball ES-423E LaB6 cathode, JEOL K-Type base, 90 degrees/15µm round tip for SEM and TEM
Product # Unit Price* Add to Quote / Cart
14-JL3508 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Tescan base, 90 degrees/15µm round tip for Tescan SEMs Kimball ES-423E LaB6 cathode, Tescan base, 90 degrees/15µm round tip for Tescan SEMs
Product # Unit Price* Add to Quote / Cart
14-TN3509 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Zeiss Base, 90 degrees/15μm round tip for DSM series SEMs, TEMs, LEO TEMs and LEO 1450 SEM Kimball ES-423E LaB6 cathode, Zeiss Base, 90 degrees/15μm round tip for DSM series SEMs, TEMs, LEO TEMs and LEO 1450 SEM
Product # Unit Price* Add to Quote / Cart
14-ZS3510 each €865,00
Qty:





Ordering information for the Kimball ES-423E long life, high stability LaB6 cathode with 90° cone and 20 µm micro-flat suitable for Microprobes and analytical SEM applications

*Prices are without tax. Tax might be added in cart.

Kimball ES-423E LaB6 cathode, AEI Base, 90 degrees/20µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs Kimball ES-423E LaB6 cathode, AEI Base, 90 degrees/20µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs
Product # Unit Price* Add to Quote / Cart
14-AE3521 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, AmRay base, 90 degrees/20µm round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie Kimball ES-423E LaB6 cathode, AmRay base, 90 degrees/20µm round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie
Product # Unit Price* Add to Quote / Cart
14-AM3522 each €860,00
Qty:


Kimball ES-423E LaB6 cathode, FEI/Philips base, 90 degrees/20µm round tip for Thermo & FEI SEM and Philips PSEM 500 and later (except XL-30) Kimball ES-423E LaB6 cathode, FEI/Philips base, 90 degrees/20µm round tip for Thermo & FEI SEM and Philips PSEM 500 and later (except XL-30)
Product # Unit Price* Add to Quote / Cart
14-FP3523 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 90 degrees/20µm round tip for Hitachi S-, SU, H- and X-Series SEM Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 90 degrees/20µm round tip for Hitachi S-, SU, H- and X-Series SEM
Product # Unit Price* Add to Quote / Cart
14-HI3524 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 90 degrees/20µm round tip for ISI / ABT / Topcon SEM Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 90 degrees/20µm round tip for ISI / ABT / Topcon SEM
Product # Unit Price* Add to Quote / Cart
14-I23526 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, JEOL K-Type base, 90 degrees/20µm round tip for SEM Kimball ES-423E LaB6 cathode, JEOL K-Type base, 90 degrees/20µm round tip for SEM
Product # Unit Price* Add to Quote / Cart
14-JL3528 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Tescan base, 90 degrees/20µm round tip for Tescan SEMs Kimball ES-423E LaB6 cathode, Tescan base, 90 degrees/20µm round tip for Tescan SEMs
Product # Unit Price* Add to Quote / Cart
14-TN3529 each €865,00
Qty:


Kimball ES-423E LaB6 cathode, Zeiss Base, 90 degrees/20μm round tip for DSM series SEMs and LEO 1450 SEM Kimball ES-423E LaB6 cathode, Zeiss Base, 90 degrees/20μm round tip for DSM series SEMs and LEO 1450 SEM
Product # Unit Price* Add to Quote / Cart
14-ZS3520 each €865,00
Qty:





Ordering information for the Kimball ES-423E high brightness / high resolution LaB6 cathode with 60° cone and 6 µm micro-flat suitable for TEM application (hardly used in SEMs)

*Prices are without tax. Tax might be added in cart.

Kimball ES-423E LaB6 cathode, AEI Base, 60 degrees/6µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 Kimball ES-423E LaB6 cathode, AEI Base, 60 degrees/6µm round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30
Product # Unit Price* Add to Quote / Cart
14-AE3561 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, AmRay base, 60 degrees/6µm round tip for AMR Leitz/AMR and AmRay, except AMR 1200 serie Kimball ES-423E LaB6 cathode, AmRay base, 60 degrees/6µm round tip for AMR Leitz/AMR and AmRay, except AMR 1200 serie
Product # Unit Price* Add to Quote / Cart
14-AM3562 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, FEI/Philips base, 60 degrees/6µm round tip for Thermo & FEI TEM and Philips EM200 TEM and later Kimball ES-423E LaB6 cathode, FEI/Philips base, 60 degrees/6µm round tip for Thermo & FEI TEM and Philips EM200 TEM and later
Product # Unit Price* Add to Quote / Cart
14-FP3563 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 60 degrees/6µm round tip for Hitachi TEM Kimball ES-423E LaB6 cathode, Hitachi S-Type base, 60 degrees/6µm round tip for Hitachi TEM
Product # Unit Price* Add to Quote / Cart
14-HI3564 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 60 degrees/6µm round tip for ABT / Topcon TEM Kimball ES-423E LaB6 cathode, ISI 2 Pin Base, 60 degrees/6µm round tip for ABT / Topcon TEM
Product # Unit Price* Add to Quote / Cart
14-I23566 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, JEOL K-Type base, 60 degrees/6µm round tip for TEM Kimball ES-423E LaB6 cathode, JEOL K-Type base, 60 degrees/6µm round tip for TEM
Product # Unit Price* Add to Quote / Cart
14-JL3568 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, Tescan base, 60 degrees/6µm round tip for Tescan Kimball ES-423E LaB6 cathode, Tescan base, 60 degrees/6µm round tip for Tescan
Product # Unit Price* Add to Quote / Cart
14-TN3569 each €925,00
Qty:


Kimball ES-423E LaB6 cathode, Zeiss Base, 60 degrees/6μm round tip for Zeiss TEMs & LEO TEMs Kimball ES-423E LaB6 cathode, Zeiss Base, 60 degrees/6μm round tip for Zeiss TEMs & LEO TEMs
Product # Unit Price* Add to Quote / Cart
14-ZS3560 each €925,00
Qty:




Electron Source Performance Table

The electron source performance table is porvided to give additional information into the performance and requirements for different type of electron emitters. Tungsten cathodes are still used in the majority in SEMs. Improved results can be obtained with LaB6 cathodes and the highest resolution can be obtained with either Schottky or cold Field Emission Sources

Emitter Type

Thermionic

Thermionic

Schottky FE

Cold FE

Cathode Material

W

LaB6

ZrO/W (100)

W (310)

Operating Temp (K)

2700

1800

1800

300

Cathode Radius (nm)

60,000

10,000

<1000

<100

Effective Source Radius (µm)

25

10

0.015

0.0025

Emission Current Density (A/cm2)

3

30

5300

17,000

Total Emission Current (µA)

200

80

200

5

Brightness (A/cm2.sr.kV)

1x104

1x105

1x107

2x107

Maximum Probe Current (nA)

1000

1000

10

0.2

Energy Spread @ Cathode (ev)

0.59

0.4

0.31

0.26

Energy Spread @ Source Exit (eV)

1.5 – 2.5

1.3 – 2.5

0.35 – 0.7

0.3 – 0.7

Beam Noise (%)

1

1

1

5 – 10

Emission Current Drift (%/h)

0.1

0.2

<0.5

5

Operating Vacuum (hPa/mbar)

<10-5

<10-6

<10-8

<10-10

Typical Cathode Life (h)

100

>1000

>5000

>2000

Cathode Regeneration (h)

None

None

None

6-12

Sensitivity to External Influences

Minimal

Low

Low

High

Additional resources for the Kimball ES-423E extended lifetime LaB6 cathodes:

TSB - Emission - Drift and LaB6 source stability
TSB - Kimball LaB6 cathode operating instructions for Leica Cambridge Instruments SEMs
TSB - Oxygen activation of LaB6 cathodes - The double saturation effect
TSB - Recovery of Emission from Kimball LaB6 following a vacuum dump
TSB - Relationship between LaB6 cathode lifetime and vacuum
TSB - The Kimball LaB6 cathode style 60-6
TSB- General guidelines for operating Kimball LaB6 cathodes
Data Table - LaB6 thermodynamics
Graph - LaB6 surface recession against brightness
Graph - LaB6 surface recession against temperature


 




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Carbon tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Silicon Nitride Films
  K-Kit wet cell holder
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  3mm embedding tubes
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sealant
  Vacuum sample storage
  Evaporation materials
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Cryo Jug & Container
  OCT cryo compound
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Replication sheets
  Preparation mats & tiles
  Cleaning / Gloves
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
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  Plastic Transfer Pipettes
  Optical Lens Tissue
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