The palladium coated substrates are available as a Ø 4”/100mm silicon wafer and a microscope slide, coated with 100nm pure palladium (99.95%). Palladium has a high hydrogen adsorption capacity which makes it an excellent material for hydrogen sensing and storage applications. Other applications include medical instrumentation, dentistry, nanotechnology, thin film research, electrical contacts and jewelry. An adhesion layer of titanium is used between the substrate and the Pd coating. Both the Ti and Pd coatings are deposited in a dedicated high vacuum deposition system using an electron beam source. The palladium coating is not atomically flat; there are height differences in the nm range. For protection, the wafers are packed in wafer carrying trays and the slides are packed in slide mailers.
Specifications of the Nano-Tec palladium coated silicon wafer and microscope slide:
Palladium coating |
100 nm Pd (99.95% Purity) |
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Titanium adhesion film |
5 nm Ti (99,99% Purity) |
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Surface roughness |
Several nm |
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Substrate |
Silicon wafer |
Microscope slide |
Dimensions |
Ø 4” / 100 mm |
75x25 mm |
Thickness |
525 µm (+/- 20 µm |
1mm |
Material type |
P (Boron) - <100> - 1-30 Ohm/cm |
Borofloat 33 – borosilicate glass |
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