EM-Tec silicon nitride support films and membranes for EM
affordable, ultra-flat generation silicon nitride membranes


Introduction

      Standard-silicon-nitride-membrane-windows
Silicon nitride membrane windows for TEM

The EM-Tec silicon nitride membranes are ultra-flat, stress optimised  and clean silicon nitride films for TEM applications. The properties of silicon nitride enable producing strong, chemical resistant, carbon-free, low background TEM support films. They are ideal for application such as nano particle imaging, quantitative carbon analysis, chemical experimentation on the support films, real-time chemical reactions and crystal growth research, thin film research,  on-film cell growth and multiple microscopy research techniques. The EM-Tec silicon nitride membranes are stress optimised for each window size and film thickness using proprietary algorithms and chemistry formulations. These support films are manufactured using state-of-the-art MEMS technology to produce debris-free, clean and highly planar membranes. 
The silicon frame is fully compatible with the standard 3mm TEM grid holders. The SiN membranes are produced on a 2.65 x 2.65mm die with the back-etched corners to fit the Ø3mm opening in the TEM grid holders. The standard silicon frame thickness is 200µm, which provide an easy to handle and sturdy support frame. The 200µm thickness is compatible with virtually all standard TEM grid holders. For special TEM grid holders, a thinner silicon support frame of 100µm is available at a higher price.

Benefits of using silicon nitride membranes:

  • amorphous, low background, low scattering material
  • high resistance to acids, bases and solvents
  • high temperature resistant up to 1000° C
  • carbon free, easily cleaned
  • large viewing area without bars
  • ideal support for multiple microscopy techniques such as TEM, SEM, FIB, EDX, Auger, XPS and AFM/SPM

Features of the EM-Tec silicon nitride support films for EM:

  • sturdy silicon nitride films with 10, 20, 30,50, 100 and 200nm thickness
  • fully compatible with Ø3.05mm TEM grid holders
  • clean, ultra-flat silicon nitride membranes
  • optimised membrane stress to achieve strength and high planarity
  • available with standard 200µm and 100µm thick silicon support frame
  • available in packs of 10 and packs of 25 in a standard TEM grid box

The silicon nitride membranes are made by growing a thin silicon nitride film with the desired thickness on a silicon wafer. After that, the windows are etched into the back of the silicon wafer to fully remove the silicon right up to the SiN layer. The wafer is then cut into 2.65 2.65mm squares and the corners are back-etched to make these unique products compatible with the standard 3.05mm TEM grid size.

Specifications of the EM-Tec silicon nitride support films for EM

Aperture size mm

Membrane thickness  nm

Frame thickness µm

0.1 x 0.1

10

20

30

50

100

200

200

100

0.25 x 0.25

10

20

30

50

100

200

200

100

0.50x0.50

10

20

30

50

100

200

200

100

1.0 x 1.0

-

20

30

50

100

200

200

100

1.0 x 0.25

-

20

30

50

100

200

200

100

Further information can be found in the Technical Support Bulletin: TSB 23-201001 EM-Tec Silicon Nitride Support Films Details.



Standard 200µm silicon frame

Ordering information for the EM-Tec 10nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 10nm silicon nitride membrane, 200µm frame EM-Tec 10nm silicon nitride membrane, 200µm frame
Product # Unit Price* Add to Quote / Order
23-201001-10 EM-Tec 10nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €181,00
23-201001-25 EM-Tec 10nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €436,50
23-201025-10 EM-Tec 10nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €181,00
23-201025-25 EM-Tec 10nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €436,50
23-201050-10 EM-Tec 10nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €181,00
23-201050-25 EM-Tec 10nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €436,50

 

Ordering information for the EM-Tec 20nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 20nm silicon nitride membrane, 200µm frame EM-Tec 20nm silicon nitride membrane, 200µm frame
Product # Unit Price* Add to Quote / Order
23-202001-10 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €152,50
23-202001-25 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €367,50
23-202025-10 EM-Tec 20nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €152,50
23-202025-25 EM-Tec 20nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €367,50
23-202050-10 EM-Tec 20nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €152,50
23-202050-25 EM-Tec 20nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €367,50
23-202100-10 EM-Tec 20nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/10 €152,50
23-202100-25 EM-Tec 20nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/25 €367,50
23-202125-10 EM-Tec 20nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/10 €152,40
23-202125-25 EM-Tec 20nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/25 €367,40

 
Ordering information for the EM-Tec 30nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 30nm silicon nitride membrane, 200µm frame EM-Tec 30nm silicon nitride membrane, 200µm frame
Product # Unit Price* Add to Quote / Order
23-203001-10 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €127,00
23-203001-25 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €306,50
23-203025-10 EM-Tec 30nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €127,00
23-203025-25 EM-Tec 30nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €306,50
23-203050-10 EM-Tec 30nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €127,00
23-203050-25 EM-Tec 30nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €306,50
23-203100-10 EM-Tec 30nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/10 €127,00
23-203100-25 EM-Tec 30nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/25 €306,50
23-203125-10 EM-Tec 30nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/10 €127,00
23-203125-25 EM-Tec 30nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/25 €306,50

 
Ordering information for the EM-Tec 50nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 50nm silicon nitride membrane, 200µm frame EM-Tec 50nm silicon nitride membrane, 200µm frame
Product # Unit Price* Add to Quote / Order
23-205001-10 EM-Tec 50nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €95,50
23-205001-25 EM-Tec 50nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €230,00
23-205025-10 EM-Tec 50nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €95,50
23-205025-25 EM-Tec 50nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €230,00
23-205050-10 EM-Tec 50nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €95,50
23-205050-25 EM-Tec 50nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €230,00
23-205100-10 EM-Tec 50nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/10 €95,50
23-205100-25 EM-Tec 50nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/25 €230,00
23-205125-10 EM-Tec 50nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/10 €95,50
23-205125-25 EM-Tec 50nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/25 €230,00

 
Ordering information for the EM-Tec 100nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 100nm silicon nitride membrane 200µm frame EM-Tec 100nm silicon nitride membrane 200µm frame
Product # Unit Price* Add to Quote / Order
23-210001-10 EM-Tec 100nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €63,50
23-210001-25 EM-Tec 100nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €153,50
23-210025-10 EM-Tec 100nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €63,50
23-210025-25 EM-Tec 100nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €153,50
23-210050-10 EM-Tec 100nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €63,50
23-210050-25 EM-Tec 100nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €153,50
23-210100-10 EM-Tec 100nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/10 €63,50
23-210100-25 EM-Tec 100nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/25 €153,50
23-210125-10 EM-Tec 100nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/10 €63,50
23-210125-25 EM-Tec 100nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/25 €153,50

 
Ordering information for the EM-Tec 200nm silicon nitride support films / membranes with 200 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 200nm silicon nitride membrane, 200µm frame EM-Tec 200nm silicon nitride membrane, 200µm frame
Product # Unit Price* Add to Quote / Order
23-220001-10 EM-Tec 200nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/10 €63,50
23-220001-25 EM-Tec 200nm silicon nitride membrane, 0.1 x 0.1mm window, 200µm frame
Qty:

pkg/25 €153,50
23-220025-10 EM-Tec 200nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/10 €63,50
23-220025-25 EM-Tec 200nm silicon nitride membrane, 0.25 x 0.25mm window, 200µm frame
Qty:

pkg/25 €153,50
23-220050-10 EM-Tec 200nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/10 €63,50
23-220050-25 EM-Tec 200nm silicon nitride membrane, 0.5 x 0.5mm window, 200µm frame
Qty:

pkg/25 €153,50
23-220100-10 EM-Tec 200nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/10 €63,50
23-220100-25 EM-Tec 200nm silicon nitride membrane, 1.0 x 1.0mm window, 200µm frame
Qty:

pkg/25 €153,50
23-220125-10 EM-Tec 200nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/10 €63,50
23-220125-25 EM-Tec 200nm silicon nitride membrane, 1.0 x 0.25mm window, 200µm frame
Qty:

pkg/25 €153,50

 

Thinner 100µm silicon frame

Ordering information for the EM-Tec 10nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 10nm silicon nitride membrane, 100µm frame EM-Tec 10nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-101001-10 EM-Tec 10nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €230,00
23-101001-25 EM-Tec 10nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €545,50
23-101025-10 EM-Tec 10nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/10 €230,00
23-101025-25 EM-Tec 10nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €545,50
23-101050-10 EM-Tec 10nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €230,00
23-101050-25 EM-Tec 10nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €545,50

 

Ordering information for the EM-Tec 20nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 20nm silicon nitride membrane, 100µm frame EM-Tec 20nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-102001-10 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €190,50
23-102001-25 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €459,50
23-102025-10 EM-Tec 20nm silicon nitride membrane, 0.25x 0.25mm window, 100µm frame
Qty:

pkg/10 €190,50
23-102025-25 EM-Tec 20nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €459,50
23-102050-10 EM-Tec 20nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €190,50
23-102050-25 EM-Tec 20nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €459,50
23-102100-10 EM-Tec 20nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/10 €190,50
23-102100-25 EM-Tec 20nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/25 €459,50
23-102125-10 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.25mm window, 100µm frame
Qty:

pkg/10 €190,50
23-102125-25 EM-Tec 20nm silicon nitride membrane, 0.1 x 0.25mm window, 100µm frame
Qty:

pkg/25 €459,50

 
Ordering information for the EM-Tec 30nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 30nm silicon nitride membrane, 100µm frame EM-Tec 30nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-103001-10 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €196,00
23-103001-25 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €383,00
23-103025-10 EM-Tec 30nm silicon nitride membrane, 0.25x 0.25mm window, 100µm frame
Qty:

pkg/10 €159,00
23-103025-25 EM-Tec 30nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €383,00
23-103050-10 EM-Tec 30nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €159,00
23-103050-25 EM-Tec 30nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €383,00
23-103100-10 EM-Tec 30nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/10 €159,00
23-103100-25 EM-Tec 30nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/25 €383,00
23-103125-10 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.25mm window, 100µm frame
Qty:

pkg/10 €159,00
23-103125-25 EM-Tec 30nm silicon nitride membrane, 0.1 x 0.25mm window, 100µm frame
Qty:

pkg/25 €383,00

 
Ordering information for the EM-Tec 50nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 50nm silicon nitride membrane, 100µm frame EM-Tec 50nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-105001-10 EM-Tec 50nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €119,50
23-105001-25 EM-Tec 50nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €287,50
23-105025-10 EM-Tec 50nm silicon nitride membrane, 0.25x 0.25mm window, 100µm frame
Qty:

pkg/10 €119,50
23-105025-25 EM-Tec 50nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €287,50
23-105050-10 EM-Tec 50nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €119,50
23-105050-25 EM-Tec 50nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €287,50
23-105100-10 EM-Tec 50nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/10 €119,50
23-105100-25 EM-Tec 50nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/25 €287,50
23-105125-10 EM-Tec 50nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/10 €119,50
23-105125-25 EM-Tec 50nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/25 €287,50

 
Ordering information for the EM-Tec 100nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 100nm silicon nitride membrane, 100µm frame EM-Tec 100nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-110001-10 EM-Tec 100nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €79,50
23-110001-25 EM-Tec 100nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €191,50
23-110025-10 EM-Tec 100nm silicon nitride membrane, 0.25x 0.25mm window, 100µm frame
Qty:

pkg/10 €79,50
23-110025-25 EM-Tec 100nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €191,50
23-110050-10 EM-Tec 100nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €79,50
23-110050-25 EM-Tec 100nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €191,50
23-110100-10 EM-Tec 100nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/10 €79,50
23-110100-25 EM-Tec 100nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/25 €191,50
23-110125-10 EM-Tec 100nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/10 €79,50
23-110125-25 EM-Tec 100nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/25 €191,50

 
Ordering information for the EM-Tec 200 nm silicon nitride support films / membranes with 100 µm frame

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
EM-Tec 200nm silicon nitride membrane, 100µm frame EM-Tec 200nm silicon nitride membrane, 100µm frame
Product # Unit Price* Add to Quote / Order
23-120001-10 EM-Tec 200nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/10 €79,50
23-120001-25 EM-Tec 200nm silicon nitride membrane, 0.1 x 0.1mm window, 100µm frame
Qty:

pkg/25 €191,50
23-120025-10 EM-Tec 200nm silicon nitride membrane, 0.25x 0.25mm window, 100µm frame
Qty:

pkg/10 €79,50
23-120025-25 EM-Tec 200nm silicon nitride membrane, 0.25 x 0.25mm window, 100µm frame
Qty:

pkg/25 €191,50
23-120050-10 EM-Tec 200nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/10 €79,50
23-120050-25 EM-Tec 200nm silicon nitride membrane, 0.5 x 0.5mm window, 100µm frame
Qty:

pkg/25 €191,50
23-120100-10 EM-Tec 200nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/10 €79,50
23-120100-25 EM-Tec 200nm silicon nitride membrane, 1.0 x 1.0mm window, 100µm frame
Qty:

pkg/25 €191,50
23-120125-10 EM-Tec 200nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/10 €79,50
23-120125-25 EM-Tec 200nm silicon nitride membrane, 1.0 x 0.25mm window, 100µm frame
Qty:

pkg/25 €191,50

 


SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM
  Product Menu with Images
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Light Microscopy

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