EM-Tec MCS-0.1CF replacement for the SIRA calibration standard
EM-Tec MCS-0.1CF certified
calibration standard, 2.5mm to 100nm
The discontinued SIRA calibration specimen was development in the 1970s and consist of two sets of resin backed cross grating replicas. The grating replicas include 19.7 lines/mm and 2160 lines/mm (feature sizes 50.7 and 0.463µm). They are mounted on standard Ø12.7mm pin stubs and gold coated for conductivity. Accuracy of the grating was within 1% on delivery. They need to be re-calibrated after 5-10 years (maximum), which is costly.
The EM-Tec MCS-0.1CF magnification calibration standards are manufactured using state of the art MEMS manufacturing techniques. They consist of an ultra-flat Si substrate with deposited chromium and gold features. The features size ranges from 2.5mm down to 100nm on a single ultra-flat compact standard. High contrast 50nm chromium is used for the larger features down to 2.5µm. For the smaller features gold over chromium is used. This ensures excellent signal at all magnifications.
Features sizes on the EM-Tec MCS-0.1CF are:
- 2.5, 1.0, 0.5 and 0.25mm
- 100, 10, 5, 2.5 and 1µm
- 500, 250 and 100nm.
The certified EM-Tec MCS-0.1CF magnification calibration standards are individually calibrated against a NIST measured standard.
The EM-Tec MCS-0.1CF is an excellent replacement for the discontinued SIRA calibration standard with additional advantages. The features used on the SIRA calibration standard are 50.7 and 0.463 µm. The compatible features on the EM-Tec MCS-0.1CF are 50µm (5x10µm) and 0.500µm (500nm). Additional advantages for the EM-Tec MCS-0.1CF are:
- All features in a single ultra-flat plane
- Constructed from non-outgassing materials (metal on silicon)
- Excellent signal to noise ratio
- Fully conductive materials
- Compatible with both SE and BSE
- Wider range of features to accurately calibrate low to high magnification ranges
- Can be cleaned with plasma cleaning
- Accuracy 0.7% or better
- Lower cost
Due to the all metal on silicon construction of the EM-Tec MCS-0.1 the lifetime of this standard is expected to be up to 10 years and beyond in clean systems. A re-calibration service is not offered for this certified calibration standard; individual re-certification is substantially more expensive than a new certified standard. It is more cost effective to purchase a new certified standard.
TSB 31 - C3200 EM - Tec MCS - 0.1CF replacement for SIRA calibration standard Revision 2
