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EM-Tec FG1 silicon SEM finder grid substrate

Order # 10-008144 EM-Tec FG1 silicon SEM finder grid substrate

EM-Tec silicon SEM finder grid substrate

Introduction
The EM-Tec FG1 silicon finder grid with 144 fields of 1x1mm has been designed to enable easy relocate small samples. The unique label in each field provide an exact reference and quick finding method for sample positions. It is intended for:

  • correlative, corroborative, collaborative and repetitive microscopy
  • multi-sample mounting for small samples
  • demonstration samples with quick finder grid
  • quick size estimation with the 1mm grid

EM-Tec FG1 Construction
The EM-Tec FG1 silicon finder grid comprises an ultra-flat conductive silicon substrate with deposited chromium lines. The chromium lines are 75nm thick and 20µm wide. The chromium lines form excellent contrast for SEM imaging and reflected light microscopy. The 12.5 x12.5 mm die is divided into 144 fields of 1x1mm. Each field has a unique alphanumeric chrome deposited label of 80µm height in the lower right corner. Thickness of the substrate is 675µm.

EM-Tec FG1 specifications

Parameter

Specification

Pattern size

12 x 12mm

Field size

1 x 1mm

Number of fields

144

Labeling

Unique, alphanumeric

Pattern lines

75nm chromium, 20µm wide

Labels

75nm chromium, 80µm height

Die (substrate) size

12.5 x 12.5mm

Orientation

<100>

Type

P (Boron)

Resistance

1-10 Ohm/cm

Grade

Prime / CZ Virgin

Coating

None, native oxide only

Thickness

675µm (± 20µm)

TTV

≤1.5µm

Warp

≤30µm

 

EM-Tec FG1 advantages
The EM-Tec FG1 silicon SEM finder grid substrate is a superior alternative compared to traditional copper SEM finder grids and engraved stubs. Advantages are:

  • excellent planarity with ultra-flat substrates (no height difference as with copper finder grids)
  • pattern is easily visible with SEM, light microscope and unaided eye
  • each individual field is referenced with a unique label
  • low background signal for SEM imaging (similar to Si chips)
  • fine bright pattern over entire area (finer and clearer than laser engraved patterns)
  • sample size can be easily judged against the 1x1mm fields
  • compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs
  • easy to mount on SEM stubs and AFM/SPM discs
  • reusable, solvent resistant and plasma cleaning compatible

Suggestions for using the EM-Tec FG1
Mount the FG1 silicon substrate on a suitable SEM stub with a conductive silver or nickel paste (EM-Tec AG42 or EM-Tec NI41).
Use a magnifier or low magnification stereo microscope to mount the samples.
Use small amount of conductive paste to secure the samples.
Record the positions(s) of the sample(s).
Place the SEM stub with the FG1 finder grids and mounted samples in the SEM.
Align the pattern with the X/Y movements of the SEM stage.
Relocate the sample(s) using previous recording notes.
Image sample and use same alignment if imaging with different microscope is needed.
Judge sample size against pattern if needed.



TSB 10-008144 EM-Tec FG1 silicon SEM finder grid substrate Revision 1




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM Series Supplies
  Field & Lab Sampler Kits
  FlowView liquid sample Kit

Instruments

  Acoustic Enclosures
  Cressington SEM coaters
  TEM Sample Prep
  Diaphragm Pump
  Rotary vacuum Pump
  Precision diamond saw  
  TEM Grids
  TEM Support Films
  Silicon Nitride Films
  K-Kit Wet Cell Holder
  Graphene Films
  TEM Grid Boxes
  Cryo Grid Boxes
  TEM Sample Staining
  3mm Embedding Tubes
  Filaments/Cathodes
  Eyelash Manipulators

Cryo Supplies

  Cryo Grid Boxes
  Other Cryo Supplies

FIB Supplies

  FIB Lift-out Grids
  FIB Low Profile Stubs
  FIB Grid Holders
  FIB Pre-tilt Holders
  FIB Pre-tilt stubs
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies

  Vacuum Gauges
  KF/NW Vacuum Parts
  KF/NW Vacuum Hoses
  ISO Vacuum flange parts
  Vacuum Oil and Grease
  Vacuum Sealant
  Diaphragm Pump
  Rotary vacuum Pump
  Vacuum Sample Storage
  Vacuum Pick-Up Pens

Sample Coating Supplies

  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  SEM Sample Coating Fluid

Evaporation Supplies

  Thermal Evaporation Sources
  Evaporation Materials
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes & Tabs
  Non-Conductive Adhesives
  Sample Storage
  Hand Tools
  Sorting Wire Mesh
  Preparation Surfaces
  Cleaning / Gloves
  Conductive Metal Powders
  Metallographic Sample Prep
  AFM/SPM Discs
  AFM/SPM Disc Pick-up Tool
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Nano-Tec Mica Discs
  HOPG Substrates

Light Microscopy

  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black Metal Slides
  Slide Storage Boxes
  LM Calibration
  Plastic Transfer Pipettes
  Optical Lens Tissue
  Glass Petri Dishes
  Digital Microscope
  PTFE Beakers