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EM-Tec FG1 silicon SEM finder grid substrate

Order # 10-008144 EM-Tec FG1 silicon SEM finder grid substrate

EM-Tec silicon SEM finder grid substrate

Introduction
The EM-Tec FG1 silicon finder grid with 144 fields of 1x1mm has been designed to enable easy relocate small samples. The unique label in each field provide an exact reference and quick finding method for sample positions. It is intended for:

  • correlative, corroborative, collaborative and repetitive microscopy
  • multi-sample mounting for small samples
  • demonstration samples with quick finder grid
  • quick size estimation with the 1mm grid

EM-Tec FG1 Construction
The EM-Tec FG1 silicon finder grid comprises an ultra-flat conductive silicon substrate with deposited chromium lines. The chromium lines are 75nm thick and 20µm wide. The chromium lines form excellent contrast for SEM imaging and reflected light microscopy. The 12.5 x12.5 mm die is divided into 144 fields of 1x1mm. Each field has a unique alphanumeric chrome deposited label of 80µm height in the lower right corner. Thickness of the substrate is 675µm.

EM-Tec FG1 specifications

Parameter

Specification

Pattern size

12 x 12mm

Field size

1 x 1mm

Number of fields

144

Labeling

Unique, alphanumeric

Pattern lines

75nm chromium, 20µm wide

Labels

75nm chromium, 80µm height

Die (substrate) size

12.5 x 12.5mm

Orientation

<100>

Type

P (Boron)

Resistance

1-10 Ohm/cm

Grade

Prime / CZ Virgin

Coating

None, native oxide only

Thickness

675µm (± 20µm)

TTV

≤1.5µm

Warp

≤30µm

 

EM-Tec FG1 advantages
The EM-Tec FG1 silicon SEM finder grid substrate is a superior alternative compared to traditional copper SEM finder grids and engraved stubs. Advantages are:

  • excellent planarity with ultra-flat substrates (no height difference as with copper finder grids)
  • pattern is easily visible with SEM, light microscope and unaided eye
  • each individual field is referenced with a unique label
  • low background signal for SEM imaging (similar to Si chips)
  • fine bright pattern over entire area (finer and clearer than laser engraved patterns)
  • sample size can be easily judged against the 1x1mm fields
  • compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs
  • easy to mount on SEM stubs and AFM/SPM discs
  • reusable, solvent resistant and plasma cleaning compatible

Suggestions for using the EM-Tec FG1
Mount the FG1 silicon substrate on a suitable SEM stub with a conductive silver or nickel paste (EM-Tec AG42 or EM-Tec NI41).
Use a magnifier or low magnification stereo microscope to mount the samples.
Use small amount of conductive paste to secure the samples.
Record the positions(s) of the sample(s).
Place the SEM stub with the FG1 finder grids and mounted samples in the SEM.
Align the pattern with the X/Y movements of the SEM stage.
Relocate the sample(s) using previous recording notes.
Image sample and use same alignment if imaging with different microscope is needed.
Judge sample size against pattern if needed.



TSB 10-008144 EM-Tec FG1 silicon SEM finder grid substrate Revision 1




REM Zubehör

TEM Zubehör

Kalibrierung

Probenvorbereitung

AFM / SPM

  Produktübersicht mit Bilder
  REM Probenteller
  Kohlenstoffklebepads
  Adapter für Probenteller
  Adapter für Probentische
  REM Probenhalter
  REM Präparationshalter
  EM Kathoden
  Silizium-Such-Substrate
  Gatan 3View Probenteller
  FEI Volumescope Probenteller
  Boxen für Probenteller
  Phenom Zubehör
  JEOL NeoScope Zub.
  Hitachi TM Zubehör
  Probenhalterkits
  FlowView Flüssigproben-Halter

Instrumente

  Schallschutzboxen
  Cressington REM Beschichtung
  TEM Sample Prep
  Membranvakuumpumpe
  Rotationsvakuumpumpe
  Präzisions-Diamantsäge
  TEM Netzchen
  Trägerfilme
  Siliziumnitrid Trägerfilme
  K-kit Nasszelle
  Graphen Filme
  TEM Grid Boxen
  Kryo Grid Boxes
  TEM Probenkontrastierung
  TEM 3mm Einbettungsrörchen
  Kathoden
  Kunstwimper-Manipulartorset

Kryo Zubehör

  Kryo Grid Box
  Weiteres Kryo Zubehör

FIB Zubehör

  FIB Lift-out Grids
  FIB flache Probenteller
  FIB Grid Probenhalter
  FIB vorgekippte Probenhalter
  FIB vorgekippte Probenteller
  FIB Grid Aufbewahrung
  REM / FIB Vergrößerung
  REM Auflösungstandards
  EDS / WDS Standars
  TEM Kalibrierung
  AFM / SPM Kalibrierung
  LM Kalibrierung

Vakuum Zubehör

  Vakuummessung
  KF/NW Vakuumbauteile
  KF/NW Vakuumschläuche
  ISO Vakuumflansch Teile
  Vakuumöle und Fette
  Vakuum-Versiegelung
  Membranvakuumpumpe
  Rotationsvakuumpumpe
  Vakuumprobenaufbewahrung
  Vakuumpinzetten

Probebeschichtung

  Sputter Targets
  Kohlenstoffstäbe & Fäden
  Quarz Kristalle
  REM Beschichtungsflüssigkeit

Bedampfung Zubehör

  Therm. Verdampfungsquellen
  Bedampfungsmaterialien
  Auflagen & Substrate
  REM Präparationshalter
  Pinzetten
  Nadeln & Sonden
  Holzspatel & Tupfer
  Polymer Transferpipetten
  Schneidwerkzeuge / Scheren
  Leitfähige Kleber
  Leitfähige Kleberbänder/Tabs
  Nicht-leitfähige Kleber
  Probenaufbewahrung
  Werkzeuge
  Sortier-Gewebe
  Probenpräparation
  Reinigung / Handschuhe
  Leitfähige Metallpulver
  Metallographie
  AFM/SPM Metallscheiben
  AFM/SPM Scheiben Aufnahme
  AFM/SPM Halter
  AFM/SPM Aufbewahrung
  Cantilever Pinzetten
  AFM/SPM Pinzetten
  Nano-Tec Mica Scheiben
  HOPG Substrate

Lichtmikroskop Zubehör

  Korrelative Deckgläschen
  Glas-Objektträger
  Deckgläschen
  Quarz Objektträger
  Quarz-Deckgläschen
  Schwarze Metallobjektträger
  Objektträger Aufbewahrung
  Kalibrierung
  Polymerpipetten
  Reinigungspapier für Linsen
  Petrischalen
  Digitalmikroskop
  PTFE Becher