The EM-Tec CXS and RXS calibration and reference standards are designed for calibration, resolution testing and performance testing. Each standard contains a selection of reference materials, in the form of element or compounds, optimized for specific calibration tasks.They are available as compact Ø 12.7mm pin stubs and Ø25.4mm discs:
The elements/compounds are all mounted with a vacuum compatible epoxy. The mounts are then precision polished to ensure that all the elements/compounds are in the same plane. Virtually all standards include a Faraday cup to enable electron probe measurements and monitoring. The polished calibration standards are carbon coated to ensure conductivity and avoid charging.
The pin stub type standards are compatible with TFS, FEI, Philips, Zeiss, LEO, TESCAN, Phenom, Leica, Cambridge instrument and CamScan SEMs. For using the calibration standards on JEOL and Hitachi SEM, please consult the page with the EM-Tec SEM stub adapters.
The EM-Tec CSX and RSX calibration and reference standards are intended for calibration and testing of:
- SEM / EDS systems and/or SEM / WDS systems
- SEM back scattered electron detector (BSD)
- SEM / GSR (gunshot residue) analysis
- Electron Probe Micro-Analyser (EPMA) systems
- SEM particle analysis systems
- SEM cathode-luminescence (CL) detector
- SEM / Raman system
-SEM / micro-XRF systems
- micro-XRF systems
Specifications of the EM-Tec CXS and RXS calibration and reference standards
Product # | Type |
Calibration application description |
Standards # |
Far. cup |
Size |
CXS-5F |
Light elements, EDS detector |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-5C |
Light elements, EDS detector, Image |
5 |
No |
Ø12.7mm x pin |
|
CXS-5N |
Light elements, EDS detector |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-5LE |
Light elements detection performance |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-5BE |
BSD, EDS detector |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-6BE |
BSD, EDS detector |
6 |
Yes |
Ø12.7mm x pin |
|
CXS-10BE |
BSD, EDS detector, heavier elements |
10 |
Yes |
Ø12.7mm x pin |
|
CXS-10BEC2 |
BSD, EDS detector, lighter elements |
10 |
Yes |
Ø12.7mm x pin |
|
CXS-5TX |
EDAX TEX set-up |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-5LX |
EDAX LEX / TEX set-up |
5 |
Yes |
Ø12.7mm x pin |
|
CXS-6F |
EDS detector & performance |
6 |
Yes |
Ø12.7mm x pin |
|
CXS-6LE |
Light elements, EDS detector |
6 |
Yes |
Ø12.7mm x pin |
|
CXS-10GSR |
GSR analysis, EDS detector |
10 |
Yes |
Ø12.7mm x pin |
|
RXS-18RE |
Rare earth metals reference |
18 |
Yes |
Ø25.4 x 9mm |
|
RXS-21RE |
Rare earth metals reference |
21 |
Yes |
Ø25.4 x 9mm |
|
RXS-36M |
Metals reference |
36 |
Yes |
Ø25.4 x 9mm |
|
RXS-36MC |
Metals & minerals reference |
36 |
Yes |
Ø25.4 x 9mm |
|
RXS-40MC |
Mineral & compounds reference |
40 |
Yes |
Ø25.4mm x pin |
|
RXS-40MM |
Metals & minerals reference |
40 |
Yes |
Ø25.4mm x pin |
|
RXS-40M+CL |
Minerals & Cathode-luminescense reference |
40 |
Yes |
Ø25.4mm x pin |
|
RXS-7CL |
Cathode-luminescence reference |
7 |
Yes |
Ø12.7mm x pin |
|
RXS-10PD |
Peak deconvolution, resolution test |
10 |
Yes |
Ø12.7mm x pin |
|
RXS-10RA |
Raman performance |
10 |
Yes |
Ø12.7mm x pin |
|
RXC-2WSi |
Fusion, BSD/X-ray contrast & resolution |
2 |
No |
Ø12.7mm x pin |
|
RXC-2TaSi |
Fusion, BSD/X-ray contrast & resolution |
2 |
No |
Ø12.7mm x pin |
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